Register information Patent

DE file number : 60 2013 063 085.2 (Status: pending/in force, Query started: August 2, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2013 063 085.2
96EP file numberEAKZ13 72 4291.3
86WO file numberWAKZPCT/EP2013/060664
97EP publication numberEPN2859410
87WO publication numberWPN2014000998
54Designation/titleTIPHOTONENQUELLE, MESSGERÄT, LITHOGRAPHISCHES SYSTEM UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H05G 2/00 (2006.01), G01N 21/956 (2006.01), H01J 65/04 (2006.01), H01J 61/02 (2006.01), H01J 61/54 (2006.01), H05B 41/38 (2006.01), H05H 1/24 (2006.01)
22DE application dateDATMay 23, 2013
96EP application dateEATMay 23, 2013
86WO application dateWATMay 23, 2013
43Date of first publicationOTJan 3, 2014
Date of publication of grantPETNov 20, 2019
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINPELLEMANS, Henricus, NL-5506 CT Veldhoven, NL; VAN DER ZOUW, Gerbrand, NL-5641GG Eindhoven, NL; SMEETS, Ralph, NL-5504 MP Veldhoven, NL; DE WIT, Johannes, NL-5708 ZJ Helmond, NL; ANTSIFEROV, Pavel, Troitsk 142190, RU; KRIVTSUN, Vladimir, Troitsk 142190, RU
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
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31
32
Foreign priorityPRC
PRNA
PRDA
US
201261658654 P
Jun 12, 2012
Due dateFT
FG		May 31, 2026
Annual fee for the 14th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002859410
Searchable text: EP000002859410
Original document: EP000002859410B1
Searchable text: EP000002859410B1
Original document: WO002014000998
Searchable text: WO002014000998
43Date of first publicationEVTJan 3, 2014
Date of the first transfer into DPMAregisterEREGTApr 16, 2015
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 11, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 20.11.2019: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 20.11.2019: deleted
  • Apr 16, 2015
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Jan 3, 2014  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Apr 15, 2015  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA May 28, 2015 May 28, 2015 Details anzeigen
4 Change of classification Change of IPC main class May 23, 2019  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Nov 20, 2019  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Dec 12, 2019 Dec 12, 2019 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Aug 21, 2020 Nov 12, 2020 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTJan 3, 2014
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTApr 15, 2015
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTMay 28, 2015
Issue numberHN22
YearPJ2015
Publication dateVTMay 28, 2015
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTMay 23, 2019
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 G03F 7/20 (2006.01)
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTNov 20, 2019
Date of update of the procedureREGTJun 11, 2025
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTDec 12, 2019
Issue numberHN50
YearPJ2019
Publication dateVTDec 12, 2019
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTAug 21, 2020
Issue numberHN46
YearPJ2020
Publication dateVTNov 12, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTNov 12, 2020