Register information Patent

DE file number : 60 2013 060 928.4 (Status: pending/in force, Query started: August 6, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2013 060 928.4
96EP file numberEAKZ13 72 3161.9
86WO file numberWAKZPCT/EP2013/060218
97EP publication numberEPN2856262
87WO publication numberWPN2013178484
54Designation/titleTITRÄGERVORRICHTUNG, LITHOGRAFIEVORRICHTUNG UND HERSTELLUNGSVERFAHREN FÜR DIE VORRICHTUNG
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
22DE application dateDATMay 17, 2013
96EP application dateEATMay 17, 2013
86WO application dateWATMay 17, 2013
43Date of first publicationOTDec 5, 2013
Date of publication of grantPETSep 25, 2019
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINDONDERS, Sjoerd, Nicolaas, Lambertus, NL-5261 CA Vught, NL; FIEN, Menno, NL-5036 AD Tilburg, NL; HOOGENDAM, Christiaan, Alexander, NL-5563 AR Westerhoven, NL; HOUBEN, Martijn, NL-5213 HP 's-Hertogenbosch, NL; JACOBS, Johannes, Henricus, Wilhelmus, NL-5591 CP Heeze, NL; KOEVOETS, Adrianus, Hendrik, NL-5731 EE Mierlo, NL; LAFARRE, Raymond, Wilhelmus, Louis, NL-5607 JS Helmond, NL; OVERKAMP, Jim, Vincent, NL-5658 HX Eindhoven, NL; TEN KATE, Nicolaas, NL-4286 EC Almkerk, NL; WESTERLAKEN, Jan, Steven, Christiaan, NL-5384 WZ Heesch, NL; DE GROOT, Antonius, Franciscus, Johannes, NL-5712 LT Someren, NL; VAN BEIJNUM, Maarten, NL-5500 AH Veldhoven, NL
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201261666348 P
Jun 29, 2012
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201261652582 P
May 29, 2012
Due dateFT
FG		May 31, 2026
Annual fee for the 14th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002856262
Searchable text: EP000002856262
Original document: EP000002856262B1
Searchable text: EP000002856262B1
Original document: WO002013178484
Searchable text: WO002013178484
43Date of first publicationEVTDec 5, 2013
Date of the first transfer into DPMAregisterEREGTApr 9, 2015
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 11, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 25.09.2019: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 25.09.2019: deleted
  • Apr 9, 2015
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Dec 5, 2013  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Apr 8, 2015  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA May 21, 2015 May 21, 2015 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Sep 25, 2019  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Oct 17, 2019 Oct 17, 2019 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 26, 2020 Sep 17, 2020 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTDec 5, 2013
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTApr 8, 2015
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTMay 21, 2015
Issue numberHN21
YearPJ2015
Publication dateVTMay 21, 2015
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTSep 25, 2019
Date of update of the procedureREGTJun 11, 2025
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTOct 17, 2019
Issue numberHN42
YearPJ2019
Publication dateVTOct 17, 2019
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJun 26, 2020
Issue numberHN38
YearPJ2020
Publication dateVTSep 17, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTSep 17, 2020