Register information Patent

DE file number : 60 2013 073 962.5 (Status: pending/in force, Query started: August 3, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2013 073 962.5
96EP file numberEAKZ13 72 1703.0
86WO file numberWAKZPCT/EP2013/059437
97EP publication numberEPN2856261
87WO publication numberWPN2013178438
54Designation/titleTIOBJEKTHALTER, LITHOGRAPHISCHER APPARAT UND LITHOGRAPHISCHES VERFAHREN
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
22DE application dateDATMay 7, 2013
96EP application dateEATMay 7, 2013
86WO application dateWATMay 7, 2013
43Date of first publicationOTDec 5, 2013
Date of publication of grantPETNov 11, 2020
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINLAURENT, Thibault, NL-5653 RL Eindhoven, NL; BLOKS, Ruud, NL-5707 SK Helmond, NL; CORTIE, Rogier, NL-6014 CK Ittervoort, NL; HOUBEN, Martijn, NL-5213 HP 's-Hertogenbosch, NL; JACOBS, Johannes, NL-5591 CP Heeze, NL; LAFARRE, Raymond, NL-5607 JS Helmond, NL; LEMPENS, Han, NL-6004 KD Weert, NL; OVERKAMP, Jim, NL-5658 HX Eindhoven, NL; PIETERSE, Gerben, NL-5624 KL Eindhoven, NL; POLET, Theodorus, NL-5361 EN Grave, NL; SIMONS, Wilhelmus, NL-5954 CD Beesel, NL; STEFFENS, Koen, NL-5505 RT Veldhoven, NL; TROMP, Siegfried, NL-3355 AE Papendrecht, NL; VY, Van Vuong, NL-5612 KX Eindhoven, NL
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201261744740 P
Oct 3, 2012
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201261709030 P
Oct 2, 2012
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201261652602 P
May 29, 2012
Due dateFT
FG		May 31, 2026
Annual fee for the 14th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002856261
Searchable text: EP000002856261
Original document: EP000002856261B1
Searchable text: EP000002856261B1
Original document: WO002013178438
Searchable text: WO002013178438
43Date of first publicationEVTDec 5, 2013
Date of the first transfer into DPMAregisterEREGTApr 9, 2015
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 11, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 11.11.2020: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 11.11.2020: deleted
  • Sep 19, 2024
    • St.36: changed (technical change)
  • Apr 9, 2015
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Dec 5, 2013  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Apr 8, 2015  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA May 21, 2015 May 21, 2015 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Nov 11, 2020  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Nov 26, 2020 Nov 26, 2020 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Aug 12, 2021 Nov 4, 2021 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTDec 5, 2013
Date of update of the procedureREGTOct 22, 2020
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTApr 8, 2015
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTMay 21, 2015
Issue numberHN21
YearPJ2015
Publication dateVTMay 21, 2015
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTNov 11, 2020
Date of update of the procedureREGTJun 11, 2025
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTNov 26, 2020
Issue numberHN48
YearPJ2020
Publication dateVTNov 26, 2020
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTNov 26, 2020
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTAug 12, 2021
Issue numberHN44
YearPJ2021
Publication dateVTNov 4, 2021
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTOct 21, 2021