Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 50 2013 015 979.5 |
96 | EP file number | EAKZ | 13 71 7727.5 |
86 | WO file number | WAKZ | PCT/EP2013/056333 |
97 | EP publication number | EPN | 2831910 |
87 | WO publication number | WPN | 2013144108 |
54 | Designation/title | TI | VORRICHTUNG ZUM ENTFERNEN EINER BESCHICHTUNG VON EINEM SUBSTRAT UND VERFAHREN |
51 | IPC main class | ICM (ICMV) | H01L 21/67 (2006.01) |
22 | DE application date | DAT | Mar 26, 2013 |
96 | EP application date | EAT | Mar 26, 2013 |
86 | WO application date | WAT | Mar 26, 2013 |
43 | Date of first publication | OT | Oct 3, 2013 |
| Date of publication of grant | PET | Nov 10, 2021 |
71/73 | Applicant/owner | INH | Obducat Europe GmbH, 78315 Radolfzell, DE |
72 | Inventor | IN | MUFFLER, Pirmin, 78359 Orsingen-Nenzingen, DE |
74 | Representative | VTR | Patentanwälte und Rechtsanwalt Weiß, Arat & Partner mbB, 78234 Engen, DE |
| Address for service | | Patentanwälte und Rechtsanwalt Weiß, Arat & Partner mbB, 78234 Engen, DE |
66 66
| Domestic priority | PRN PRD
| 10 2012 102 740.4 Mar 29, 2012
|
66 66
| Domestic priority | PRN PRD
| 10 2012 103 330.7 Apr 17, 2012
|
| Due date | FT FG | Mar 31, 2025 Annual fee for the 13th year
Patent fees |
| Patent division in charge | | 36 |
97 | EP language of publication | ELANG | DE - Deutsch |
84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000002831910 Searchable text:
EP000002831910 Original document:
EP000002831910B1 Searchable text:
EP000002831910B1 Original document:
WO002013144108 Searchable text:
WO002013144108 |
43 | Date of first publication | EVT | Oct 3, 2013 |
| Date of the first transfer into DPMAregister | EREGT | Mar 20, 2015 |
| Date of the (most recent) update in DPMAregister | REGT | Aug 7, 2024 (Show all update days)(Hide all update days)- Aug 7, 2024
- Procedures: Procedure relating to PCT application, Publication of PCT application, 03.10.2013: deleted
- May 9, 2024; Apr 25, 2024; Apr 10, 2024; Mar 2, 2024; Feb 10, 2024; Feb 8, 2023; Nov 3, 2022; Sep 29, 2022; Feb 11, 2022; Nov 23, 2021; Oct 21, 2021; Jul 15, 2021; Jan 26, 2017
- Historical data not available for this/these date(s)
- Mar 20, 2015
- Date of the first transfer into DPMAregister
|