Register information Patent

DE file number : 60 2013 007 783.5 (Status: pending/in force, Query started: June 28, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2013 007 783.5
96EP file numberEAKZ13 15 3160.0
97EP publication numberEPN2624284
54Designation/titleTINiedrigenergieionenstrahlätzung
51IPC main classICM
(ICMV)		 H01L 21/311 (2006.01)
22DE application dateDATJan 30, 2013
96EP application dateEATJan 30, 2013
43Date of first publicationOTAug 7, 2013
Date of publication of grantPETMay 25, 2016
71/73Applicant/ownerINHFEI Company, Hillsboro, Oreg., US
72InventorINRue, Mr. Chad, Portland, OR 97229, US
74RepresentativeVTRVOSSIUS & PARTNER Patentanwälte Rechtsanwälte mbB, 81675 München, DE
Address for service VOSSIUS & PARTNER Patentanwälte Rechtsanwälte mbB, 81675 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201213717272
Dec 17, 2012
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201261593281 P
Jan 31, 2012
Due dateFT
FG		Jan 31, 2026
Annual fee for the 14th year Patent fees
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002624284
Searchable text: EP000002624284
Original document: EP000002624284B1
Searchable text: EP000002624284B1
43Date of first publicationEVTAug 7, 2013
Date of the first transfer into DPMAregisterEREGTSep 20, 2013
Date of the (most recent) update in DPMAregisterREGTDec 20, 2024
(Show all update days)(Hide all update days)
  • Dec 20, 2024
    • Due date: changed
  • Dec 14, 2024
    • St.36: changed (technical change)
  • Jun 8, 2024; Jan 18, 2024; Jan 18, 2023; Jun 8, 2022; Dec 11, 2021; Jan 29, 2021; Jan 24, 2020; Aug 17, 2019; Jul 11, 2019; Jan 24, 2019; Jan 27, 2018; Jun 8, 2017; May 4, 2017; Apr 27, 2017; Feb 7, 2017; Jan 26, 2017; Jul 7, 2016; May 28, 2016; May 26, 2016; Apr 14, 2016
    • Historical data not available for this/these date(s)
  • Sep 20, 2013
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Aug 7, 2013  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Sep 19, 2013 Sep 19, 2013 Details anzeigen
3 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) May 25, 2016  Details anzeigen
4 Publications Publication by DPMA of mention regarding EP patent grant Jul 7, 2016 Jul 7, 2016 Details anzeigen
5 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Feb 28, 2017 Jun 8, 2017 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTAug 7, 2013
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTSep 19, 2013
Issue numberHN38
YearPJ2013
Publication dateVTSep 19, 2013
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTMay 25, 2016
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJul 7, 2016
Issue numberHN27
YearPJ2016
Publication dateVTJul 7, 2016
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTFeb 28, 2017
Issue numberHN23
YearPJ2017
Publication dateVTJun 8, 2017
Type of publicationPARTBibliographic data
PartHTPart 3