Register information Patent

DE file number : 60 2012 063 163.5 (Status: pending/in force, Query started: November 5, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2012 063 163.5
96EP file numberEAKZ12 76 6409.2
86WO file numberWAKZPCT/EP2012/068386
97EP publication numberEPN2764408
87WO publication numberWPN2013050243
54Designation/titleTIHALTEVORRICHTUNG, LITHOGRAPHIEVORRICHTUNG UND VERFAHREN ZUR VERWENDUNG DER HALTEVORRICHTUNG
51IPC main classICM
(ICMV)
G03F 7/20 (2006.01)
22DE application dateDATSep 19, 2012
96EP application dateEATSep 19, 2012
86WO application dateWATSep 19, 2012
43Date of first publicationOTApr 11, 2013
Date of publication of grantPETAug 21, 2019
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINGILISSEN, Noud, NL-2692 BK 's-Gravenzande, NL; SIJBEN, Anko, NL-5467 NA Veghel, NL; CORNELISSEN, Bas, NL-5653 RN Eindhoven, NL; NOTENBOOM, Arnoud, NL-5247 MV Rosmalen, NL; VAN DER WILK, Ronald, NL-5511 AC Knegsel, NL; SCHMITZ, Roger, Wilhelmus, Antonius, Henricus, 5709 SC Helmond, NL; WILL, Manon, Elise, 5615 SZ Eindhoven, NL
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201161544039 P
Oct 6, 2011
Due dateFT
FG
Sep 30, 2025
Annual fee for the 14th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002764408
Searchable text: EP000002764408
Original document: EP000002764408B1
Searchable text: EP000002764408B1
Original document: WO002013050243
Searchable text: WO002013050243
43Date of first publicationEVTApr 11, 2013
Date of the first transfer into DPMAregisterEREGTSep 26, 2014
Date of the (most recent) update in DPMAregisterREGTOct 8, 2024
(Show all update days)(Hide all update days)
  • Oct 8, 2024
    • Due date: changed
    • Procedures: Procedure relating to PCT application, Publication of PCT application, 11.04.2013: deleted
  • Oct 6, 2023; Jun 15, 2022; Oct 7, 2021; Oct 6, 2020; Aug 6, 2020; Jul 23, 2020; Sep 26, 2019; Aug 21, 2019; Aug 3, 2019; Aug 1, 2019; Apr 18, 2019; Aug 2, 2018
    • Historical data not available for this/these date(s)
  • Sep 26, 2014
    • Date of the first transfer into DPMAregister
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to PCT application WO publication Apr 11, 2013   Display details
2 Procedure relating to EP application EPO 1st publication Aug 13, 2014   Display details
3 Publications Publication of a mention regarding EP 1st publication by DPMA Sep 25, 2014 Sep 25, 2014 Display details
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Aug 21, 2019   Display details
5 Publications Publication by DPMA of mention regarding EP patent grant Sep 12, 2019 Sep 12, 2019 Display details
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 3, 2020 Aug 27, 2020 Display details