Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 60 2012 063 163.5 |
96 | EP file number | EAKZ | 12 76 6409.2 |
86 | WO file number | WAKZ | PCT/EP2012/068386 |
97 | EP publication number | EPN | 2764408 |
87 | WO publication number | WPN | 2013050243 |
54 | Designation/title | TI | HALTEVORRICHTUNG, LITHOGRAPHIEVORRICHTUNG UND VERFAHREN ZUR VERWENDUNG DER HALTEVORRICHTUNG |
51 | IPC main class | ICM (ICMV) | G03F 7/20 (2006.01) |
22 | DE application date | DAT | Sep 19, 2012 |
96 | EP application date | EAT | Sep 19, 2012 |
86 | WO application date | WAT | Sep 19, 2012 |
43 | Date of first publication | OT | Apr 11, 2013 |
| Date of publication of grant | PET | Aug 21, 2019 |
71/73 | Applicant/owner | INH | ASML Netherlands B.V., Veldhoven, NL |
72 | Inventor | IN | GILISSEN, Noud, NL-2692 BK 's-Gravenzande, NL; SIJBEN, Anko, NL-5467 NA Veghel, NL; CORNELISSEN, Bas, NL-5653 RN Eindhoven, NL; NOTENBOOM, Arnoud, NL-5247 MV Rosmalen, NL; VAN DER WILK, Ronald, NL-5511 AC Knegsel, NL; SCHMITZ, Roger, Wilhelmus, Antonius, Henricus, 5709 SC Helmond, NL; WILL, Manon, Elise, 5615 SZ Eindhoven, NL |
| Address for service | | ASML Netherlands B.V., 5500 AH Veldhoven, NL |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 201161544039 P Oct 6, 2011
|
| Due date | FT FG | Sep 30, 2025 Annual fee for the 14th year
Patent fees |
| Patent division in charge | | 51 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000002764408 Searchable text:
EP000002764408 Original document:
EP000002764408B1 Searchable text:
EP000002764408B1 Original document:
WO002013050243 Searchable text:
WO002013050243 |
43 | Date of first publication | EVT | Apr 11, 2013 |
| Date of the first transfer into DPMAregister | EREGT | Sep 26, 2014 |
| Date of the (most recent) update in DPMAregister | REGT | Oct 8, 2024 (Show all update days)(Hide all update days)- Oct 8, 2024
- Due date: changed
- Procedures: Procedure relating to PCT application, Publication of PCT application, 11.04.2013: deleted
- Oct 6, 2023; Jun 15, 2022; Oct 7, 2021; Oct 6, 2020; Aug 6, 2020; Jul 23, 2020; Sep 26, 2019; Aug 21, 2019; Aug 3, 2019; Aug 1, 2019; Apr 18, 2019; Aug 2, 2018
- Historical data not available for this/these date(s)
- Sep 26, 2014
- Date of the first transfer into DPMAregister
|