Master data| INID | Criterion | Field | Content |
|---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
| 21 | DE file number | DAKZ | 60 2012 021 924.6 |
| 96 | EP file number | EAKZ | 12 76 1311.5 |
| 86 | WO file number | WAKZ | PCT/CN2012/072693 |
| 97 | EP publication number | EPN | 2690496 |
| 87 | WO publication number | WPN | 2012126364 |
| 54 | Designation/title | TI | VERFAHREN ZUR MESSUNG DER VERZERRUNG VON PROJEKTIONSOBJEKTIVEN |
| 51 | IPC main class | ICM
(ICMV) | G03F 7/20 (2006.01) |
| 51 | IPC secondary class(es) | ICS
(ICSV) | H01L 21/66 (2006.01), G03F 1/44 (2012.01) |
| 22 | DE application date | DAT | Mar 21, 2012 |
| 96 | EP application date | EAT | Mar 21, 2012 |
| 86 | WO application date | WAT | Mar 21, 2012 |
| 43 | Date of first publication | OT | Sep 27, 2012 |
| Date of publication of grant | PET | Aug 17, 2016 |
| 71/73 | Applicant/owner | INH | Shanghai Micro Electronics Equipment (Group) Co., Ltd., Shanghai, CN |
| 72 | Inventor | IN | FANG, Li, Shanghai 201203, CN; SUN, Gang, Shanghai 201203, CN; MIN, Jinhua, Shanghai 201203, CN; ZHANG, Jun, Shanghai 201203, CN |
| 74 | Representative | VTR | LAVOIX Munich Zweigniederlassung der Cabinet Lavoix SAS, 80335 München, DE |
| Address for service | | LAVOIX Munich, 80335 München, DE |
33
31
32
| Foreign priority | PRC
PRNA
PRDA
| CN
201110068060
Mar 21, 2011
|
| Due date | FT
FG | Mar 31, 2025
Annual fee for the 14th year
Patent fees |
| Patent division in charge | | 51 |
| 97 | EP language of publication | ELANG | EN - Englisch |
| 84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000002690496
Searchable text:
EP000002690496
Original document:
EP000002690496B1
Searchable text:
EP000002690496B1
Original document:
WO002012126364
Searchable text:
WO002012126364 |
| 43 | Date of first publication | EVT | Sep 27, 2012 |
| Date of the first transfer into DPMAregister | EREGT | Mar 14, 2014 |
| Date of the (most recent) update in DPMAregister | REGT | Apr 25, 2024
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- Historical data not available for this/these date(s)
- Mar 14, 2014
- Date of the first transfer into DPMAregister
|
