Register information Patent

DE file number : 60 2012 076 218.7 (Status: pending/in force, Query started: August 2, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2012 076 218.7
96EP file numberEAKZ12 72 5373.0
86WO file numberWAKZPCT/EP2012/060133
97EP publication numberEPN2729844
87WO publication numberWPN2013007442
54Designation/titleTILITHOGRAFISCHES STRUKTURIERUNGSVERFAHREN UND FOTOLACKE ZUR VERWENDUNG DARIN
51IPC main classICM
(ICMV)		 G03F 7/004 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/075 (2006.01), C08F 30/08 (2006.01)
22DE application dateDATMay 30, 2012
96EP application dateEATMay 30, 2012
86WO application dateWATMay 30, 2012
43Date of first publicationOTJan 17, 2013
Date of publication of grantPETJul 28, 2021
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINWUISTER, Sander, 5627 CW Eindhoven, NL; YAKUNIN, Andrei, 5731 KA Mierlo, NL; KRIVTSUN, Vladimir, Troitsk 142190, RU
Address for service ASML Netherlands B.V., 5500 AH Veldhoven, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201161505768 P
Jul 8, 2011
Due dateFT
FG		May 31, 2026
Annual fee for the 15th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002729844
Searchable text: EP000002729844
Original document: EP000002729844B1
Searchable text: EP000002729844B1
Original document: WO002013007442
Searchable text: WO002013007442
43Date of first publicationEVTJan 17, 2013
Date of the first transfer into DPMAregisterEREGTJun 27, 2014
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 11, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 28.07.2021: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 28.07.2021: deleted
  • Sep 19, 2024
    • St.36: changed (technical change)
  • Jun 27, 2014
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Jan 17, 2013  Details anzeigen
2 Procedure relating to EP application EPO 1st publication May 14, 2014  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jun 26, 2014 Jun 26, 2014 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jul 28, 2021  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Aug 19, 2021 Aug 19, 2021 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Apr 29, 2022 Jul 21, 2022 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTJan 17, 2013
Date of update of the procedureREGTJul 8, 2021
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMay 14, 2014
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJun 26, 2014
Issue numberHN26
YearPJ2014
Publication dateVTJun 26, 2014
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJul 28, 2021
Date of update of the procedureREGTJun 11, 2025
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTAug 19, 2021
Issue numberHN33
YearPJ2021
Publication dateVTAug 19, 2021
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTAug 19, 2021
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTApr 29, 2022
Issue numberHN29
YearPJ2022
Publication dateVTJul 21, 2022
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJun 30, 2022