Master data| INID | Criterion | Field | Content |
|---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
| 21 | DE file number | DAKZ | 60 2012 075 100.2 |
| 96 | EP file number | EAKZ | 12 71 6017.4 |
| 86 | WO file number | WAKZ | PCT/EP2012/057366 |
| 97 | EP publication number | EPN | 2699966 |
| 87 | WO publication number | WPN | 2012143548 |
| 54 | Designation/title | TI | NETZWERKARCHITEKTUR UND PROTOKOLL FÜR EINEN CLUSTER VON LITHOGRAFIEGERÄTEN |
| 51 | IPC main class | ICM
(ICMV) | G03F 7/20 (2006.01) |
| 51 | IPC secondary class(es) | ICS
(ICSV) | H01J 37/317 (2006.01) |
| 22 | DE application date | DAT | Apr 23, 2012 |
| 96 | EP application date | EAT | Apr 23, 2012 |
| 86 | WO application date | WAT | Apr 23, 2012 |
| 43 | Date of first publication | OT | Oct 26, 2012 |
| Date of publication of grant | PET | Apr 7, 2021 |
| 71/73 | Applicant/owner | INH | ASML Netherlands B.V., Veldhoven, NL |
| 72 | Inventor | IN | VAN KERVINCK, Marcel Nicolaas Jacobus, NL-2595 BV Den Haag, NL; DE BOER, Guido, NL-4143 LN Leerdam, NL |
| Address for service | | ASML Netherlands BV, 5504 DR VELDHOVEN, NL |
33
31
32
| Foreign priority | PRC
PRNA
PRDA
| US
201161533673 P
Sep 12, 2011
|
33
31
32
| Foreign priority | PRC
PRNA
PRDA
| US
201161478117 P
Apr 22, 2011
|
| Due date | FT
FG | Apr 30, 2025
Annual fee for the 14th year
Patent fees |
| Patent division in charge | | 51 |
| 97 | EP language of publication | ELANG | EN - Englisch |
| 84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000002699966
Searchable text:
EP000002699966
Original document:
EP000002699966B1
Searchable text:
EP000002699966B1
Original document:
WO002012143548
Searchable text:
WO002012143548 |
| 43 | Date of first publication | EVT | Oct 26, 2012 |
| Date of the first transfer into DPMAregister | EREGT | Apr 10, 2014 |
| Date of the (most recent) update in DPMAregister | REGT | Sep 19, 2024
(Show all update days)(Hide all update days)- Sep 19, 2024
- Procedures: Procedure relating to PCT application, Publication of PCT application, 26.10.2012: deleted
- May 14, 2024; May 9, 2024; May 11, 2023; May 10, 2022; Mar 31, 2022; Feb 24, 2022; May 8, 2021; Apr 29, 2021; Mar 19, 2021; Mar 18, 2021; Dec 17, 2020; Aug 14, 2019; May 9, 2019
- Historical data not available for this/these date(s)
- Apr 10, 2014
- Date of the first transfer into DPMAregister
|
