Register information Patent

DE file number : 60 2012 071 832.3 (Status: pending/in force, Query started: October 21, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2012 071 832.3
96EP file numberEAKZ12 17 1001.6
97EP publication numberEPN2555234
54Designation/titleTIElektrostatische Klemme, lithografische Vorrichtung und Verfahren zur Herstellung einer elektrostatischen Klemme
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01L 21/683 (2006.01)
22DE application dateDATJun 6, 2012
96EP application dateEATJun 6, 2012
43Date of first publicationOTFeb 6, 2013
Date of publication of grantPETAug 19, 2020
71/73Applicant/ownerINHASML Holding N.V., Veldhoven, NL
72InventorINHelmus, Peter, New Milford, CT 6776, US; Wilklow, Ronald, Fairfield, CT 6824, US; Deng, Jianguo, Wilton CT 06897, US
Address for service ASML Holding N.V., 5504 DR VELDHOVEN, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201161514320 P
Aug 2, 2011
Due dateFT
FG		Jun 30, 2025
Annual fee for the 14th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002555234
Searchable text: EP000002555234
Original document: EP000002555234B1
Searchable text: EP000002555234B1
43Date of first publicationEVTFeb 6, 2013
Date of the first transfer into DPMAregisterEREGTMar 27, 2013
Date of the (most recent) update in DPMAregisterREGTSep 19, 2024
(Show all update days)(Hide all update days)
  • Sep 19, 2024
    • St.36: changed (technical change)
  • Jul 10, 2024; May 9, 2024; Jul 5, 2023; Jul 27, 2022; Aug 5, 2021; Jul 10, 2021; Jul 8, 2021; Aug 13, 2020; Jul 29, 2020; Oct 24, 2019; Apr 27, 2017
    • Historical data not available for this/these date(s)
  • Mar 27, 2013
    • Date of the first transfer into DPMAregister
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to EP application EPO 1st publication Feb 6, 2013   Display details
2 Publications Publication of a mention regarding EP 1st publication by DPMA Mar 21, 2013 Mar 21, 2013 Display details
3 Change of classification Change of IPC main class Oct 7, 2019   Display details
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Aug 19, 2020   Display details
5 Publications Publication by DPMA of mention regarding EP patent grant Sep 3, 2020 Sep 3, 2020 Display details
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision May 20, 2021 Aug 12, 2021 Display details