Register information Patent

DE file number : 60 2012 000 738.9 (Status: pending/in force, Query started: August 6, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2012 000 738.9
96EP file numberEAKZ12 16 8660.4
97EP publication numberEPN2535770
54Designation/titleTIKlemmvorrichtung, Anordnung und lithografische Projektionsvorrichtung
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
22DE application dateDATMay 21, 2012
96EP application dateEATMay 21, 2012
43Date of first publicationOTDec 19, 2012
Date of publication of grantPETJan 1, 2014
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINPaulussen, Dennis, NL-5611 SR Eindhoven, NL; Boon, Maarten, NL-5066 MB Moergestel, NL; Veltman, Rob W., NL-6601 DZ Wijchen, NL
Address for service ASML Netherlands B.V., 5504 DR VELDHOVEN, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201161497348 P
Jun 15, 2011
Due dateFT
FG		May 31, 2026
Annual fee for the 15th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002535770
Searchable text: EP000002535770
Original document: EP000002535770B1
Searchable text: EP000002535770B1
43Date of first publicationEVTDec 19, 2012
Date of the first transfer into DPMAregisterEREGTFeb 1, 2013
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 11, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 01.01.2014: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 01.01.2014: deleted
  • Feb 1, 2013
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Dec 19, 2012  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Jan 31, 2013 Jan 31, 2013 Details anzeigen
3 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jan 1, 2014  Details anzeigen
4 Publications Publication by DPMA of mention regarding EP patent grant Feb 20, 2014 Feb 20, 2014 Details anzeigen
5 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Oct 2, 2014 Jan 8, 2015 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTDec 19, 2012
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJan 31, 2013
Issue numberHN5
YearPJ2013
Publication dateVTJan 31, 2013
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJan 1, 2014
Date of update of the procedureREGTJun 11, 2025
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTFeb 20, 2014
Issue numberHN8
YearPJ2014
Publication dateVTFeb 20, 2014
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTOct 2, 2014
Issue numberHN2
YearPJ2015
Publication dateVTJan 8, 2015
Type of publicationPARTBibliographic data
PartHTPart 3