Register information Patent

DE file number : 60 2011 061 500.9 (Status: pending/in force, Query started: September 27, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2011 061 500.9
96EP file numberEAKZ11 83 2920.0
86WO file numberWAKZPCT/US2011/050565
97EP publication numberEPN2624913
87WO publication numberWPN2012050685
54Designation/titleTIVERFAHREN FÜR LPP-GESTEUERTE LASERAUSGABE WÄHREND NICHT-ULTRAVIOLETTSTRAHLUNGS-PERIODEN
51IPC main classICM
(ICMV)		 H05G 2/00 (2006.01)
22DE application dateDATSep 6, 2011
96EP application dateEATSep 6, 2011
86WO application dateWATSep 6, 2011
43Date of first publicationOTApr 19, 2012
Date of publication of grantPETAug 21, 2019
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINPARTLO, William, N., San Diego, CA 92127, US; SANDSTROM, Richard, L., San Diego, CA 92127, US; BROWN, Daniel, J.w., San Diego, CA 92127, US; FOMENKOV, Igor, V., San Diego, CA 92127, US
74RepresentativeVTRGrünecker Patent- und Rechtsanwälte PartG mbB, 80802 München, DE
Address for service Grünecker Patent- und Rechtsanwälte PartG mbB, 80802 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201113157233
Jun 9, 2011
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
404564 P
Oct 4, 2010
Due dateFT
FG		Sep 30, 2025
Annual fee for the 15th year Patent fees
Patent division in charge 54
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002624913
Searchable text: EP000002624913
Original document: EP000002624913B1
Searchable text: EP000002624913B1
Original document: WO002012050685
Searchable text: WO002012050685
43Date of first publicationEVTApr 19, 2012
Date of the first transfer into DPMAregisterEREGTSep 27, 2013
Date of the (most recent) update in DPMAregisterREGTOct 8, 2024
(Show all update days)(Hide all update days)
  • Oct 8, 2024
    • Due date: changed
    • Procedures: Procedure relating to PCT application, Publication of PCT application, 19.04.2012: deleted
  • Oct 6, 2023; Jun 15, 2022; Oct 7, 2021; Oct 6, 2020; Jul 29, 2020; Jul 16, 2020; Sep 26, 2019; Aug 14, 2019; Aug 1, 2019; Feb 21, 2019; Sep 14, 2017
    • Historical data not available for this/these date(s)
  • Sep 27, 2013
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Apr 19, 2012  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Aug 14, 2013  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Sep 26, 2013 Sep 26, 2013 Details anzeigen
4 Change of classification Change of IPC main class Feb 7, 2019  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Aug 21, 2019  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Sep 5, 2019 Sep 5, 2019 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 3, 2020 Aug 20, 2020 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTApr 19, 2012
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTAug 14, 2013
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTSep 26, 2013
Issue numberHN39
YearPJ2013
Publication dateVTSep 26, 2013
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTFeb 7, 2019
51IPC main classICM
(ICMV)		 H05G 2/00 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 A61N 5/06 (2006.01)
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTAug 21, 2019
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTSep 5, 2019
Issue numberHN36
YearPJ2019
Publication dateVTSep 5, 2019
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJun 3, 2020
Issue numberHN34
YearPJ2020
Publication dateVTAug 20, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJul 29, 2020