Register information Patent

DE file number : 60 2011 060 933.5 (Status: pending/in force, Query started: May 1, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2011 060 933.5
96EP file numberEAKZ11 82 0497.3
86WO file numberWAKZPCT/US2011/048754
97EP publication numberEPN2608872
87WO publication numberWPN2012027330
54Designation/titleTIVERFAHREN UND VORRICHTUNG FÜR NEUTRALE STRAHLENVERARBEITUNG AUF BASIS EINER CLUSTER-IONENSTRAHL-TECHNOLOGIE
51IPC main classICM
(ICMV)		 H01J 37/05 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01J 37/317 (2006.01), H05H 3/00 (2006.01), H01L 21/02 (2006.01), H01L 21/265 (2006.01), H01L 21/311 (2006.01)
22DE application dateDATAug 23, 2011
96EP application dateEATAug 23, 2011
86WO application dateWATAug 23, 2011
43Date of first publicationOTMar 1, 2012
Date of publication of grantPETJul 31, 2019
71/73Applicant/ownerINHExogenesis Corporation, Billerica, Mass., US
72InventorINKIRKPATRICK, Sean, R., Billerica Massachusetts 01821, US; KIRKPATRICK, Allen, R., Billerica Massachusetts 01821, US
74RepresentativeVTRStolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
Address for service Stolmár & Partner Patentanwälte, 80331 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201161490675 P
May 27, 2011
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201161484421 P
May 10, 2011
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
201161473359 P
Apr 8, 2011
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
37622510 P
Aug 23, 2010
Due dateFT
FG		Aug 31, 2025
Annual fee for the 15th year Patent fees
Patent division in charge 54
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002608872
Searchable text: EP000002608872
Original document: EP000002608872B1
Searchable text: EP000002608872B1
Original document: WO002012027330
Searchable text: WO002012027330
43Date of first publicationEVTMar 1, 2012
Date of the first transfer into DPMAregisterEREGTAug 15, 2013
Date of the (most recent) update in DPMAregisterREGTFeb 26, 2025
(Show all update days)(Hide all update days)
  • Feb 26, 2025
    • Due date: changed
  • Sep 11, 2024
    • Procedures: Procedure relating to PCT application, Publication of PCT application, 01.03.2012: deleted
  • Mar 9, 2024; Sep 2, 2022; Sep 3, 2021; Oct 6, 2020; Aug 13, 2020; Jul 23, 2020; Oct 24, 2019; Sep 11, 2019; Aug 19, 2019; Jul 12, 2019; Jul 11, 2019; May 23, 2019; Dec 20, 2018; Aug 3, 2017; Aug 4, 2016
    • Historical data not available for this/these date(s)
  • Aug 15, 2013
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Mar 1, 2012  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Jul 3, 2013  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Aug 14, 2013 Aug 14, 2013 Details anzeigen
4 Change of classification Change of IPC main class Jun 7, 2019  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jul 31, 2019  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Aug 22, 2019 Aug 22, 2019 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 3, 2020 Aug 27, 2020 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTMar 1, 2012
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJul 3, 2013
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTAug 14, 2013
Issue numberHN33
YearPJ2013
Publication dateVTAug 14, 2013
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTJun 7, 2019
51IPC main classICM
(ICMV)		 H01J 37/05 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 B01D 59/00 (2006.01)
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJul 31, 2019
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTAug 22, 2019
Issue numberHN34
YearPJ2019
Publication dateVTAug 22, 2019
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJun 3, 2020
Issue numberHN35
YearPJ2020
Publication dateVTAug 27, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTAug 13, 2020