Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 60 2011 045 158.8 |
96 | EP file number | EAKZ | 11 79 8145.6 |
86 | WO file number | WAKZ | PCT/JP2011/064172 |
97 | EP publication number | EPN | 2587529 |
87 | WO publication number | WPN | 2011162261 |
54 | Designation/title | TI | SAUGVORRICHTUNG, VORRICHTUNG ZUR ÜBERWACHUNG EINES HALBLEITERBAUELEMENTS UND VERFAHREN ZUR ÜBERWACHUNG EINES HALBLEITERBAUELEMENTS |
51 | IPC main class | ICM (ICMV) | G01N 21/95 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | H01L 21/683 (2006.01), H01L 21/687 (2006.01), H01L 21/66 (2006.01) |
22 | DE application date | DAT | Jun 21, 2011 |
96 | EP application date | EAT | Jun 21, 2011 |
86 | WO application date | WAT | Jun 21, 2011 |
43 | Date of first publication | OT | Dec 29, 2011 |
| Date of publication of grant | PET | Jan 17, 2018 |
71/73 | Applicant/owner | INH | Hamamatsu Photonics K.K., Hamamatsu, Shizuoka, JP |
72 | Inventor | IN | TERADA Hirotoshi, Hamamatsu-shi, Shizuoka 435-8558, JP; MATSUURA Hiroyuki, Hamamatsu-shi, Shizuoka 435-8558, JP |
| Address for service | | Marks & Clerk (Luxembourg) LLP, 1017 LUXEMBOURG, LU |
33 31 32
| Foreign priority | PRC PRNA PRDA
| JP 2010142868 Jun 23, 2010
|
| Due date | FT FG | Jun 30, 2025 Annual fee for the 15th year
Patent fees |
| Patent division in charge | | 58 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000002587529 Searchable text:
EP000002587529 Original document:
EP000002587529B1 Searchable text:
EP000002587529B1 Original document:
WO002011162261 Searchable text:
WO002011162261 |
43 | Date of first publication | EVT | Dec 29, 2011 |
| Date of the first transfer into DPMAregister | EREGT | Jun 14, 2013 |
| Date of the (most recent) update in DPMAregister | REGT | Jul 10, 2024 (Show all update days)(Hide all update days)- Jul 10, 2024; May 14, 2024; May 10, 2023; May 14, 2022; Jun 3, 2021; Jun 15, 2020; Aug 21, 2019; Jun 26, 2019; Apr 4, 2019; Mar 7, 2019; Jan 3, 2019; Nov 29, 2018; Jun 21, 2018; Feb 10, 2018; Feb 6, 2018; Jan 17, 2018; Jan 11, 2018; Apr 13, 2017; Aug 2, 2013
- Historical data not available for this/these date(s)
- Jun 14, 2013
- Date of the first transfer into DPMAregister
|