Register information Patent

DE file number : 60 2011 061 011.2 (Status: pending/in force, Query started: September 26, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2011 061 011.2
96EP file numberEAKZ11 18 2583.2
97EP publication numberEPN2447777
54Designation/titleTILithografische Vorrichtung zur Übertragung von Mustern von einer Musterungsvorrichtung auf ein Substrat sowie Dämpfungsverfahren
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
22DE application dateDATSep 23, 2011
96EP application dateEATSep 23, 2011
43Date of first publicationOTMay 2, 2012
Date of publication of grantPETAug 7, 2019
71/73Applicant/ownerINHASML Netherlands BV, Veldhoven, NL
72InventorINButler, Hans, 5685 AC Best, NL; Oude Nijhuis, Marco, 5611 DL Eindhoven, NL
Address for service ASML Netherlands BV Corporate Intellectual Property, 5500 AH VELDHOVEN, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
407319 P
Oct 27, 2010
Due dateFT
FG		Sep 30, 2025
Annual fee for the 15th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002447777
Searchable text: EP000002447777
Original document: EP000002447777B1
Searchable text: EP000002447777B1
43Date of first publicationEVTMay 2, 2012
Date of the first transfer into DPMAregisterEREGTJun 15, 2012
Date of the (most recent) update in DPMAregisterREGTOct 8, 2024
(Show all update days)(Hide all update days)
  • Oct 8, 2024
    • Due date: changed
  • Oct 6, 2023; Jun 15, 2022; Oct 7, 2021; Oct 6, 2020; Jul 29, 2020; Jul 15, 2020; Sep 26, 2019; Aug 20, 2019; Jul 24, 2019; Jul 18, 2019; Mar 7, 2019; Jun 16, 2016; Feb 16, 2013
    • Historical data not available for this/these date(s)
  • Jun 15, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication May 2, 2012  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Jun 14, 2012 Jun 14, 2012 Details anzeigen
3 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Aug 7, 2019  Details anzeigen
4 Publications Publication by DPMA of mention regarding EP patent grant Aug 29, 2019 Aug 29, 2019 Details anzeigen
5 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 3, 2020 Aug 20, 2020 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTMay 2, 2012
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJun 14, 2012
Issue numberHN24
YearPJ2012
Publication dateVTJun 14, 2012
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTAug 7, 2019
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTAug 29, 2019
Issue numberHN35
YearPJ2019
Publication dateVTAug 29, 2019
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJun 3, 2020
Issue numberHN34
YearPJ2020
Publication dateVTAug 20, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJul 29, 2020