Register information Patent

DE file number : 60 2010 041 134.6 (Status: pending/in force, Query started: September 27, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2010 041 134.6
96EP file numberEAKZ10 76 0786.3
86WO file numberWAKZPCT/NL2010/050603
97EP publication numberEPN2478548
87WO publication numberWPN2011034428
54Designation/titleTIOPTISCHES SYSTEM FÜR GELADENE TEILCHEN MIT MEHREREN STRAHLEN
51IPC main classICM
(ICMV)		 H01J 37/317 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01J 37/147 (2006.01)
22DE application dateDATSep 17, 2010
96EP application dateEATSep 17, 2010
86WO application dateWATSep 17, 2010
43Date of first publicationOTMar 24, 2011
Date of publication of grantPETMar 29, 2017
71/73Applicant/ownerINHMapper Lithography IP B.V., Delft, NL
72InventorINKRUIT, Pieter, NL-2611 EB Delft, NL; ZONNEVYLLE, Aernout, Christiaan, NL-3552 CG Utrecht, NL
74RepresentativeVTRFleischer, Engels & Partner mbB, Patentanwälte, 51429 Bergisch Gladbach, DE
Address for service f & e patent, 51429 Bergisch Gladbach, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
243948 P
Sep 18, 2009
Due dateFT
FG		Sep 30, 2025
Annual fee for the 16th year Patent fees
Patent division in charge 54
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002478548
Searchable text: EP000002478548
Original document: EP000002478548B1
Searchable text: EP000002478548B1
Original document: WO002011034428
Searchable text: WO002011034428
43Date of first publicationEVTMar 24, 2011
Date of the first transfer into DPMAregisterEREGTSep 7, 2012
Date of the (most recent) update in DPMAregisterREGTOct 8, 2024
(Show all update days)(Hide all update days)
  • Oct 8, 2024
    • Due date: changed
    • Procedures: Procedure relating to PCT application, Publication of PCT application, 24.03.2011: deleted
  • Dec 23, 2023; Dec 15, 2023; Oct 6, 2023; Jun 15, 2022; Oct 7, 2021; Oct 6, 2020; Sep 26, 2019; Aug 19, 2019; Jul 11, 2019; Sep 12, 2018; Mar 29, 2018; Feb 22, 2018; Oct 17, 2017; Oct 10, 2017; May 11, 2017; Mar 31, 2017; Mar 30, 2017; Oct 27, 2016; Feb 16, 2013
    • Historical data not available for this/these date(s)
  • Sep 7, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO publication Mar 24, 2011  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Jul 25, 2012  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Sep 6, 2012 Sep 6, 2012 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Mar 29, 2017  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant May 11, 2017 May 11, 2017 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jan 3, 2018 Mar 29, 2018 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTMar 24, 2011
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJul 25, 2012
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTSep 6, 2012
Issue numberHN36
YearPJ2012
Publication dateVTSep 6, 2012
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTMar 29, 2017
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTMay 11, 2017
Issue numberHN19
YearPJ2017
Publication dateVTMay 11, 2017
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJan 3, 2018
Issue numberHN13
YearPJ2018
Publication dateVTMar 29, 2018
Type of publicationPARTBibliographic data
PartHTPart 3