Register information Patent

DE file number : 60 2010 063 913.4 (Status: pending/in force, Query started: September 19, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2010 063 913.4
96EP file numberEAKZ10 72 8666.8
86WO file numberWAKZPCT/EP2010/059460
97EP publication numberEPN2462486
87WO publication numberWPN2011015412
54Designation/titleTIVERFAHREN UND SYSTEME ZUR INSPEKTION VON GEGENSTÄNDEN
51IPC main classICM
(ICMV)		 G03F 1/00 (2012.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 1/84 (2012.01), G01N 21/65 (2006.01), G01N 21/94 (2006.01), G01N 21/956 (2006.01), G01N 21/95 (2006.01), G01N 21/64 (2006.01), G03F 1/24 (2012.01)
22DE application dateDATJul 2, 2010
96EP application dateEATJul 2, 2010
86WO application dateWATJul 2, 2010
43Date of first publicationOTFeb 10, 2011
Date of publication of grantPETApr 15, 2020
71/73Applicant/ownerINHASML Netherlands BV, Veldhoven, NL
72InventorINIVANOV, Vitalii, PL-02-790 Warsaw, PL; DEN BOEF, Arie, NL-5581 NA Waalre, NL; BANINE, Vadim, NL-5751 SB Deurne, NL; SCACCABAROZZI, Luigi, NL-5554 KD Valkenswaard, NL; IOSAD, Nikolay, NL-5663 RH Geldrop, NL
Address for service ASML Netherlands BV, 5504 DR VELDHOVEN, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
231161 P
Aug 4, 2009
Due dateFT
FG		Jul 31, 2025
Annual fee for the 16th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002462486
Searchable text: EP000002462486
Original document: EP000002462486B1
Searchable text: EP000002462486B1
Original document: WO002011015412
Searchable text: WO002011015412
43Date of first publicationEVTFeb 10, 2011
Date of the first transfer into DPMAregisterEREGTJul 27, 2012
Date of the (most recent) update in DPMAregisterREGTAug 9, 2024
(Show all update days)(Hide all update days)
  • Aug 9, 2024
    • Due date: changed
    • Procedures: Procedure relating to PCT application, Publication of PCT application, 10.02.2011: deleted
  • Aug 3, 2023; Jun 15, 2022; Aug 7, 2021; Mar 18, 2021; Mar 4, 2021; Jul 27, 2020; Apr 29, 2020; Mar 26, 2020; Nov 7, 2019; Aug 20, 2019; Jul 18, 2019; Feb 16, 2013
    • Historical data not available for this/these date(s)
  • Jul 27, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to PCT application WO publication Feb 10, 2011   Display details
2 Procedure relating to EP application EPO 1st publication Jun 13, 2012   Display details
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jul 26, 2012 Jul 26, 2012 Display details
4 Change of classification Change of IPC main class Oct 21, 2019   Display details
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Apr 15, 2020   Display details
6 Publications Publication by DPMA of mention regarding EP patent grant Apr 30, 2020 Apr 30, 2020 Display details
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jan 18, 2021 Apr 8, 2021 Display details