Register information Patent

DE file number : 60 2005 045 318.0 (Status: not pending/lapsed, Query started: April 26, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2005 045 318.0
96EP file numberEAKZ10 18 6134.2
97EP publication numberEPN2267759
54Designation/titleTIBelichtungsvorrichtung, Belichtungsverfahren und Bauelementsherstellungsverfahren
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01)
22DE application dateDATJan 27, 2005
96EP application dateEATJan 27, 2005
43Date of first publicationOTDec 29, 2010
Date of publication of grantPETNov 26, 2014
71/73Applicant/ownerINHNikon Corp., Tokio/Tokyo, JP
72InventorINShibazaki, Yuichi, Tokyo 100-8331, JP
74RepresentativeVTRHOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, 81925 München, DE
Address for service HOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004025837
Feb 2, 2004
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004300566
Oct 14, 2004
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR
Published EP/WO documentsEPWOPNOriginal document: EP000002267759
Searchable text: EP000002267759
Original document: EP000002267759B1
Searchable text: EP000002267759B1
43Date of first publicationEVTDec 29, 2010
Date of the first transfer into DPMAregisterEREGTMay 27, 2011
Date of the (most recent) update in DPMAregisterREGTOct 21, 2020
(Show all update days)(Hide all update days)
  • Oct 21, 2020; Sep 16, 2020; Aug 12, 2019; Feb 9, 2019; Jan 24, 2019; Jan 27, 2018; Sep 28, 2017; Feb 7, 2017; Jan 30, 2016; Dec 9, 2015; Nov 5, 2015; Jan 31, 2015; Jan 8, 2015; Nov 28, 2014; Nov 27, 2014; Nov 18, 2014; Feb 15, 2013
    • Historical data not available for this/these date(s)
  • May 27, 2011
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Dec 29, 2010  Details anzeigen
2 Publications Publication of a mention regarding EP 1st publication by DPMA Feb 10, 2011 Feb 10, 2011 Details anzeigen
3 Change of classification Change of IPC main class Sep 26, 2012  Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Nov 26, 2014  Details anzeigen
5 Publications Publication by DPMA of mention regarding EP patent grant Jan 8, 2015 Jan 8, 2015 Details anzeigen
6 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Aug 27, 2015 Dec 10, 2015 Details anzeigen
7 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Aug 1, 2020 Oct 22, 2020 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTDec 29, 2010
View procedures Publications (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTFeb 10, 2011
Issue numberHN6
YearPJ2011
Publication dateVTFeb 10, 2011
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTSep 26, 2012
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 21/027 (2006.01)
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTNov 26, 2014
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJan 8, 2015
Issue numberHN2
YearPJ2015
Publication dateVTJan 8, 2015
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTAug 27, 2015
Issue numberHN50
YearPJ2015
Publication dateVTDec 10, 2015
Type of publicationPARTBibliographic data
PartHTPart 3
View procedures Administrative procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTApplication is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural statusVSTTAug 1, 2020
Issue numberHN43
YearPJ2020
Publication dateVTOct 22, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTOct 21, 2020