Register information Patent

DE file number : 603 48 007.1 (Status: not pending/lapsed, Query started: May 3, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ603 48 007.1
96EP file numberEAKZ10 15 7436.6
97EP publication numberEPN2211232
54Designation/titleTILithographische Elemente für den extrem-ultravioletten Bereich mit reduziertem Schlieren-Niveau
51IPC main classICM
(ICMV)		 G03F 1/24 (2012.01)
51IPC secondary class(es)ICS
(ICSV)		 C03B 19/14 (2006.01), G03F 7/20 (2006.01), G01B 11/16 (2006.01), C03C 3/06 (2006.01), C03C 4/00 (2006.01)
22DE application dateDATMar 4, 2003
96EP application dateEATMar 4, 2003
43Date of first publicationOTJul 28, 2010
Date of publication of grantPETSep 2, 2015
71/73Applicant/ownerINHCorning Incorporated, Corning, NY, US
72InventorINHrdina, Kenneth Edward, Horseheads, NY 14845, US; Maxon, John E., Canton, NY 13617, US; McLean, Brent R., Canton, NY 13617, US
74RepresentativeVTRHernandez, Yorck, Dipl.-Ing., 82031 Grünwald, DE
Address for service HERNANDEZ IP, 82031 Grünwald, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
362052 P
Mar 5, 2002
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSDE, FR, GB, IT, NL
Published EP/WO documentsEPWOPNOriginal document: EP000002211232
Searchable text: EP000002211232
Original document: EP000002211232B1
Searchable text: EP000002211232B1
43Date of first publicationEVTJul 28, 2010
Date of the first transfer into DPMAregisterEREGTMay 26, 2011
Date of the (most recent) update in DPMAregisterREGTMar 7, 2023
(Show all update days)(Hide all update days)
  • Mar 7, 2023; Feb 15, 2022; Jul 8, 2021; Apr 7, 2021; Feb 17, 2021; Dec 5, 2020; Dec 3, 2020; Feb 21, 2020; Aug 21, 2019; Feb 21, 2019; Apr 18, 2018; Oct 25, 2017; Apr 12, 2017; Apr 11, 2017; Sep 15, 2016; Aug 11, 2016; Jun 1, 2016; Apr 15, 2016; Sep 18, 2015; Sep 4, 2015; Sep 3, 2015; Feb 14, 2013; Jul 2, 2011
    • Historical data not available for this/these date(s)
  • May 26, 2011
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Jul 28, 2010  Details anzeigen
2 Procedure relating to EP application EPO publication of search report Jul 28, 2010  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Sep 9, 2010 Sep 9, 2010 Details anzeigen
4 Change of classification Change of IPC main class Feb 20, 2015  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Sep 2, 2015  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Oct 15, 2015 Oct 15, 2015 Details anzeigen
7 New representative details New representative details May 29, 2016  Details anzeigen
8 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 3, 2016 Sep 15, 2016 Details anzeigen
9 Administrative procedure IP right lapsed through expiry of term of protection Mar 4, 2023  Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJul 28, 2010
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of search report
Date of legal/procedural statusVSTTJul 28, 2010
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTSep 9, 2010
Issue numberHN36
YearPJ2010
Publication dateVTSep 9, 2010
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTFeb 20, 2015
51IPC main classICM
(ICMV)		 G03F 1/24 (2012.01)
51Previous IPC main classICMF
(ICMVF)		 G03F 7/20 (2006.01)
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTSep 2, 2015
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTOct 15, 2015
Issue numberHN42
YearPJ2015
Publication dateVTOct 15, 2015
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures New representative details (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTNew representative details
Legal/procedural statusVSTNew representative details
Date of legal/procedural statusVSTTMay 29, 2016
74RepresentativeVTRHernandez, Yorck, Dipl.-Ing., 82031 Grünwald, DE
74Previous representativeVTRFWITTMANN HERNANDEZ Patentanwälte Partnerschaft mbB, 81479 München, DE
Date of update of the procedureREGTJul 8, 2021
View procedures Procedure relating to EP application (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJun 3, 2016
Issue numberHN37
YearPJ2016
Publication dateVTSep 15, 2016
Type of publicationPARTBibliographic data
PartHTPart 3
View procedures Administrative procedure (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTIP right lapsed through expiry of term of protection
Date of legal/procedural statusVSTTMar 4, 2023
Date of update of the procedureREGTMar 7, 2023