Register information Patent

DE file number : 60 2009 032 112.9 (Status: pending/in force, Query started: August 8, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2009 032 112.9
96EP file numberEAKZ09 75 8960.0
86WO file numberWAKZPCT/US2009/044084
97EP publication numberEPN2286002
87WO publication numberWPN2009148799
54Designation/titleTIVERFAHREN ZUR HESTELLUNG VON ORIENTIERTEN SCHICHTEN AUS TANTALOXID.
51IPC main classICM
(ICMV)		 C23C 16/40 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 C23C 16/448 (2006.01), C30B 29/16 (2006.01), H01L 21/316 (2006.01), C30B 25/02 (2006.01), H10N 97/00 (2023.01)
22DE application dateDATMay 15, 2009
96EP application dateEATMay 15, 2009
86WO application dateWATMay 15, 2009
43Date of first publicationOTDec 10, 2009
Date of publication of grantPETJul 8, 2015
71/73Applicant/ownerINHMicron Technology, Inc., Boise, Id., US
72InventorINBHAT, Vishwanath, BoiseID 83716, US; ANTONOV, Vassil, BoiseID 83706, US
74RepresentativeVTRMarks & Clerk (Luxembourg) LLP, Luxembourg, LU
Address for service Marks & Clerk (Luxembourg) LLP, 1017 LUXEMBOURG, LU
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
132758
Jun 4, 2008
Due dateFT
FG		May 31, 2026
Annual fee for the 18th year Patent fees
Patent division in charge 45
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR
81Designated WO countriesWDSAL, RS, BA
Published EP/WO documentsEPWOPNOriginal document: EP000002286002
Searchable text: EP000002286002
Original document: EP000002286002B1
Searchable text: EP000002286002B1
Original document: WO002009148799
Searchable text: WO002009148799
43Date of first publicationEVTDec 10, 2009
Date of the first transfer into DPMAregisterEREGTMay 27, 2011
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 11, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 08.07.2015: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 08.07.2015: deleted
  • May 27, 2011
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO first publication without search report Dec 10, 2009  Details anzeigen
2 Procedure relating to PCT application WO publication Dec 10, 2009  Details anzeigen
3 Procedure relating to EP application EPO 1st publication Feb 23, 2011  Details anzeigen
4 Procedure relating to EP application EPO publication of search report Feb 23, 2011  Details anzeigen
5 Publications Publication of a mention regarding EP 1st publication by DPMA Apr 7, 2011 Apr 7, 2011 Details anzeigen
6 Change of classification Change of IPC main class Nov 14, 2014  Details anzeigen
7 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jul 8, 2015  Details anzeigen
8 Publications Publication by DPMA of mention regarding EP patent grant Aug 20, 2015 Aug 20, 2015 Details anzeigen
9 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Apr 11, 2016 Jul 21, 2016 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO first publication without search report
Date of legal/procedural statusVSTTDec 10, 2009
View procedures Procedure relating to PCT application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTDec 10, 2009
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTFeb 23, 2011
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of search report
Date of legal/procedural statusVSTTFeb 23, 2011
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTApr 7, 2011
Issue numberHN14
YearPJ2011
Publication dateVTApr 7, 2011
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTNov 14, 2014
51IPC main classICM
(ICMV)		 C23C 16/40 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 C23C 16/40 (2006.01)
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJul 8, 2015
Date of update of the procedureREGTJun 11, 2025
View procedures Publications (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTAug 20, 2015
Issue numberHN34
YearPJ2015
Publication dateVTAug 20, 2015
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTApr 11, 2016
Issue numberHN29
YearPJ2016
Publication dateVTJul 21, 2016
Type of publicationPARTBibliographic data
PartHTPart 3