Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 60 2009 029 949.2 |
96 | EP file number | EAKZ | 09 75 4556.0 |
86 | WO file number | WAKZ | PCT/JP2009/058802 |
97 | EP publication number | EPN | 2282188 |
87 | WO publication number | WPN | 2009145048 |
54 | Designation/title | TI | OPTISCHES BELEUCHTUNGSSYSTEM UND BELICHTUNGSGERÄT |
51 | IPC main class | ICM (ICMV) | G01M 11/00 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | G03F 7/20 (2006.01), H01L 21/027 (2006.01) |
22 | DE application date | DAT | May 12, 2009 |
96 | EP application date | EAT | May 12, 2009 |
86 | WO application date | WAT | May 12, 2009 |
43 | Date of first publication | OT | Dec 3, 2009 |
| Date of publication of grant | PET | Mar 11, 2015 |
71/73 | Applicant/owner | INH | Nikon Corp., Tokio/Tokyo, JP |
72 | Inventor | IN | TANITSU Osamu, Tokyo 100-8331, JP; TANAKA Hirohisa, Tokyo 100-8331, JP |
74 | Representative | VTR | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB, 81925 München, DE |
| Address for service | | HOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, 81925 München, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| JP 2008138841 May 28, 2008
|
| Due date | FT FG | May 31, 2026 Annual fee for the 18th year
Patent fees |
| Patent division in charge | | 51 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR |
81 | Designated WO countries | WDS | AL, RS, BA |
| Published EP/WO documents | EPWOPN | Original document: EP000002282188 Searchable text:
EP000002282188 Original document:
EP000002282188B1 Searchable text:
EP000002282188B1 Original document:
WO002009145048 Searchable text:
WO002009145048 |
43 | Date of first publication | EVT | Dec 3, 2009 |
| Date of the first transfer into DPMAregister | EREGT | May 26, 2011 |
| Date of the (most recent) update in DPMAregister | REGT | Apr 10, 2025 (Show all update days)(Hide all update days)- Apr 10, 2025
- Nov 12, 2024
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- Historical data not available for this/these date(s)
- May 26, 2011
- Date of the first transfer into DPMAregister
|