Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 60 2008 062 889.2 |
96 | EP file number | EAKZ | 08 83 1947.0 |
86 | WO file number | WAKZ | PCT/US2008/077203 |
97 | EP publication number | EPN | 2195834 |
87 | WO publication number | WPN | 2009039486 |
54 | Designation/title | TI | SYSTEME UND VERFAHREN ZUM ERZEUGEN VON PERSISTENTEN DATEN FÜR EINEN WAFER UND ZUR VERWENDUNG PERSISTENTER DATEN FÜR UNTERSUCHUNGSBEZOGENE FUNKTIONEN |
51 | IPC main class | ICM (ICMV) | H01L 21/66 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | G06T 1/20 (2006.01), G06T 7/00 (2017.01) |
22 | DE application date | DAT | Sep 22, 2008 |
96 | EP application date | EAT | Sep 22, 2008 |
86 | WO application date | WAT | Sep 22, 2008 |
43 | Date of first publication | OT | Mar 26, 2009 |
| Date of publication of grant | PET | Jun 24, 2020 |
71/73 | Applicant/owner | INH | KLA-Tencor Corporation, Milpitas, Calif., US |
72 | Inventor | IN | BHASKAR, Kris, San Jose, CA 95120, US; BHASKAR, Chetana, San Jose, CA 95120, US; KULKARNI, Ashok, San Jose, CA 95120, US; ROSENGAUS, Eliezer, Palo Alto, CA 94303, US; CAMPOCHIARO, Cecelia, Sunnyvale, CA 94087, US; MAHER, Chris, Campbell, CA 95008, US; DUFFY, Brian, San Jose, CA 95120, US; KHULLAR, Aneesh, Sunnyvale, CA 94089, US; KOHLI, Alpa, Saratoga, CA 95070, US; BALASUBRAMANIAN, Lalita, Fremont, CA 94555, US; BHATTACHARYYA, Santosh, San Jose, CA 95123, US; MAHADEVAN, Mohan, Livermore, CA 94550, US |
74 | Representative | VTR | Stolmár & Partner Patentanwälte PartG mbB, 80331 München, DE |
| Address for service | | Stolmár & Partner Patentanwälte PartG mbB, 80331 München, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 974030 P Sep 20, 2007
|
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 234201 Sep 19, 2008
|
| Due date | FT FG | Sep 30, 2025 Annual fee for the 18th year
Patent fees |
| Patent division in charge | | 33 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR |
81 | Designated WO countries | WDS | AL, RS, BA, MK |
| Published EP/WO documents | EPWOPN | Original document:
EP000002195834 Searchable text:
EP000002195834 Original document:
EP000002195834B1 Searchable text:
EP000002195834B1 Original document:
WO002009039486 Searchable text:
WO002009039486 |
43 | Date of first publication | EVT | Mar 26, 2009 |
| Date of the first transfer into DPMAregister | EREGT | May 27, 2011 |
| Date of the (most recent) update in DPMAregister | REGT | Oct 2, 2024 (Show all update days)(Hide all update days)- Oct 2, 2024
- Oct 3, 2023; Oct 5, 2022; Oct 6, 2021; Jun 17, 2021; May 13, 2021; Oct 6, 2020; Aug 20, 2020; Jul 9, 2020; Jun 4, 2020; Feb 6, 2020; Oct 25, 2018; Sep 7, 2017; Dec 15, 2016; Feb 14, 2013
- Historical data not available for this/these date(s)
- May 27, 2011
- Date of the first transfer into DPMAregister
|