Register information Patent

DE file number : 60 2008 062 889.2 (Status: pending/in force, Query started: May 1, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2008 062 889.2
96EP file numberEAKZ08 83 1947.0
86WO file numberWAKZPCT/US2008/077203
97EP publication numberEPN2195834
87WO publication numberWPN2009039486
54Designation/titleTISYSTEME UND VERFAHREN ZUM ERZEUGEN VON PERSISTENTEN DATEN FÜR EINEN WAFER UND ZUR VERWENDUNG PERSISTENTER DATEN FÜR UNTERSUCHUNGSBEZOGENE FUNKTIONEN
51IPC main classICM
(ICMV)
H01L 21/66 (2006.01)
51IPC secondary class(es)ICS
(ICSV)
G06T 1/20 (2006.01), G06T 7/00 (2017.01)
22DE application dateDATSep 22, 2008
96EP application dateEATSep 22, 2008
86WO application dateWATSep 22, 2008
43Date of first publicationOTMar 26, 2009
Date of publication of grantPETJun 24, 2020
71/73Applicant/ownerINHKLA-Tencor Corporation, Milpitas, Calif., US
72InventorINBHASKAR, Kris, San Jose, CA 95120, US; BHASKAR, Chetana, San Jose, CA 95120, US; KULKARNI, Ashok, San Jose, CA 95120, US; ROSENGAUS, Eliezer, Palo Alto, CA 94303, US; CAMPOCHIARO, Cecelia, Sunnyvale, CA 94087, US; MAHER, Chris, Campbell, CA 95008, US; DUFFY, Brian, San Jose, CA 95120, US; KHULLAR, Aneesh, Sunnyvale, CA 94089, US; KOHLI, Alpa, Saratoga, CA 95070, US; BALASUBRAMANIAN, Lalita, Fremont, CA 94555, US; BHATTACHARYYA, Santosh, San Jose, CA 95123, US; MAHADEVAN, Mohan, Livermore, CA 94550, US
74RepresentativeVTRStolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
Address for service Stolmár & Partner Patentanwälte PartG mbB, 80331 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
974030 P
Sep 20, 2007
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
234201
Sep 19, 2008
Due dateFT
FG
Sep 30, 2025
Annual fee for the 18th year Patent fees
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR
81Designated WO countriesWDSAL, RS, BA, MK
Published EP/WO documentsEPWOPNOriginal document: EP000002195834
Searchable text: EP000002195834
Original document: EP000002195834B1
Searchable text: EP000002195834B1
Original document: WO002009039486
Searchable text: WO002009039486
43Date of first publicationEVTMar 26, 2009
Date of the first transfer into DPMAregisterEREGTMay 27, 2011
Date of the (most recent) update in DPMAregisterREGTOct 2, 2024
(Show all update days)(Hide all update days)
  • Oct 2, 2024
    • Due date: changed
  • Oct 3, 2023; Oct 5, 2022; Oct 6, 2021; Jun 17, 2021; May 13, 2021; Oct 6, 2020; Aug 20, 2020; Jul 9, 2020; Jun 4, 2020; Feb 6, 2020; Oct 25, 2018; Sep 7, 2017; Dec 15, 2016; Feb 14, 2013
    • Historical data not available for this/these date(s)
  • May 27, 2011
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO first publication without search report Mar 26, 2009  Details anzeigen
2 Procedure relating to PCT application WO publication Mar 26, 2009  Details anzeigen
3 Procedure relating to EP application EPO 1st publication Jun 16, 2010  Details anzeigen
4 Publications Publication of a mention regarding EP 1st publication by DPMA Jul 29, 2010 Jul 29, 2010 Details anzeigen
5 Change of classification Change of IPC main class Nov 20, 2017  Details anzeigen
6 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Jun 24, 2020  Details anzeigen
7 Publications Publication by DPMA of mention regarding EP patent grant Jul 9, 2020 Jul 9, 2020 Details anzeigen
8 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Mar 25, 2021 Jun 17, 2021 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO first publication without search report
Date of legal/procedural statusVSTTMar 26, 2009
View procedures Procedure relating to PCT application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTMar 26, 2009
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJun 16, 2010
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJul 29, 2010
Issue numberHN30
YearPJ2010
Publication dateVTJul 29, 2010
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTNov 20, 2017
51IPC main classICM
(ICMV)
H01L 21/66 (2006.01)
51Previous IPC main classICMF
(ICMVF)
H01L 21/66 (2006.01)
View procedures Procedure relating to EP application (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTJun 24, 2020
View procedures Publications (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJul 9, 2020
Issue numberHN28
YearPJ2020
Publication dateVTJul 9, 2020
Type of publicationPARTBibliographic data
PartHTPart 5
Date of update of the procedureREGTJul 9, 2020
View procedures Procedure relating to EP application (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTMar 25, 2021
Issue numberHN24
YearPJ2021
Publication dateVTJun 17, 2021
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJun 17, 2021