Register information Patent

DE file number : 60 2008 061 585.5 (Status: pending/in force, Query started: October 23, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2008 061 585.5
96EP file numberEAKZ08 80 2422.9
86WO file numberWAKZPCT/EP2008/007916
97EP publication numberEPN2208224
87WO publication numberWPN2009036995
54Designation/titleTIELEKTROSTATISCHE KLEMME, LITHOGRAPHISCHE VORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG EINER ELEKTROSTATISCHEN KLEMME
51IPC main classICM
(ICMV)		 H01L 21/683 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01L 21/687 (2006.01), G03F 7/20 (2006.01)
22DE application dateDATSep 19, 2008
96EP application dateEATSep 19, 2008
86WO application dateWATSep 19, 2008
43Date of first publicationOTMar 26, 2009
Date of publication of grantPETNov 6, 2019
71/73Applicant/ownerINHASML Netherlands B.V., Veldhoven, NL
72InventorINSIJBEN, Anko, Jozef, Cornelus, NL-5403 WC Uden, NL; VAN EMPEL, Tjarko, Adriaan, Rudolf, NL-5643 SC Eindhoven, NL; VISSER, Raimond, NL-5685 EK Best, NL; FRANSSEN, Johannes, Hendrikus, Gertrudis, NL-5521 GL Eersel, NL; YANG, Zongquan, NL-5627 VC Eindhoven, NL; BRALS, Albert, NL-5741 NX Beek en Donk, NL; RIJPMA, Albert, Pieter, NL-5501 EJ Veldhoven, NL
Address for service ASML Netherlands B.V., 5504 DR VELDHOVEN, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
902501
Sep 21, 2007
Due dateFT
FG		Sep 30, 2026
Annual fee for the 19th year Patent fees
Patent division in charge 36
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, NO, PL, PT, RO, SE, SI, SK, TR
81Designated WO countriesWDSAL, RS, BA, MK
Published EP/WO documentsEPWOPNOriginal document: EP000002208224
Searchable text: EP000002208224
Original document: EP000002208224B1
Searchable text: EP000002208224B1
Original document: WO002009036995
Searchable text: WO002009036995
43Date of first publicationEVTMar 26, 2009
Date of the first transfer into DPMAregisterEREGTMay 26, 2011
Date of the (most recent) update in DPMAregisterREGTOct 8, 2025
(Show all update days)(Hide all update days)
  • Oct 8, 2025
    • Due date: changed
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 06.11.2019: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 06.11.2019: deleted
  • Oct 8, 2024
    • Due date: changed
  • Oct 6, 2023; Jun 15, 2022; Oct 7, 2021; Oct 6, 2020; Sep 23, 2020; Nov 21, 2019; Oct 17, 2019; Aug 20, 2019; Jun 27, 2019; Oct 29, 2018; Feb 14, 2013
    • Historical data not available for this/these date(s)
  • May 26, 2011
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO first publication without search report Mar 26, 2009  Details anzeigen
2 Procedure relating to PCT application WO publication Mar 26, 2009  Details anzeigen
3 Procedure relating to EP application EPO 1st publication Jul 21, 2010  Details anzeigen
4 Procedure relating to EP application EPO publication of search report Jul 21, 2010  Details anzeigen
5 Publications Publication of a mention regarding EP 1st publication by DPMA Sep 2, 2010 Sep 2, 2010 Details anzeigen
6 Change of classification Change of IPC main class Jun 11, 2019  Details anzeigen
7 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Nov 6, 2019  Details anzeigen
8 Publications Publication by DPMA of mention regarding EP patent grant Nov 21, 2019 Nov 21, 2019 Details anzeigen
9 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Aug 7, 2020 Oct 29, 2020 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO first publication without search report
Date of legal/procedural statusVSTTMar 26, 2009
View procedures Procedure relating to PCT application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTMar 26, 2009
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTJul 21, 2010
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of search report
Date of legal/procedural statusVSTTJul 21, 2010
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTSep 2, 2010
Issue numberHN35
YearPJ2010
Publication dateVTSep 2, 2010
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTJun 11, 2019
51IPC main classICM
(ICMV)		 H01L 21/683 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 21/683 (2006.01)
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTNov 6, 2019
Date of update of the procedureREGTOct 8, 2025
View procedures Publications (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTNov 21, 2019
Issue numberHN47
YearPJ2019
Publication dateVTNov 21, 2019
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTAug 7, 2020
Issue numberHN44
YearPJ2020
Publication dateVTOct 29, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTOct 6, 2020