Register information Patent

DE file number : 60 2007 029 350.2 (Status: pending/in force, Query started: August 4, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Pending/in force
21	DE file number	DAKZ	60 2007 029 350.2
96	EP file number	EAKZ	07 77 7259.8
86	WO file number	WAKZ	PCT/US2007/012393
97	EP publication number	EPN	2036169
87	WO publication number	WPN	2007145792
54	Designation/title	TI	KAMMER FÜR EINE HOCHENERGIE-EXCIMER-LASERQUELLE
51	IPC main class	ICM (ICMV)	H01S 3/20 (2006.01)
51	IPC secondary class(es)	ICS (ICSV)	H01S 3/03 (2006.01), H01S 3/225 (2006.01)
22	DE application date	DAT	May 22, 2007
96	EP application date	EAT	May 22, 2007
86	WO application date	WAT	May 22, 2007
43	Date of first publication	OT	Dec 21, 2007
	Date of publication of grant	PET	Mar 27, 2013
71/73	Applicant/owner	INH	Cymer, LLC (n.d.Ges. d.Staates Nevada), San Diego, Kalif., US
72	Inventor	IN	STEIGER, Thomas, D., San Diego, CA 92128, US; PARTLO, William, N., Poway, CA 92064, US
74	Representative	VTR	Grünecker Patent- und Rechtsanwälte PartG mbB, 80802 München, DE
	Address for service		Grünecker Patent- und Rechtsanwälte PartG mbB, 80802 München, DE
33 31 32	Foreign priority	PRC PRNA PRDA	US 447502 Jun 5, 2006
	Due date	FT FG	May 31, 2026 Annual fee for the 20th year Patent fees
	Patent division in charge		54
97	EP language of publication	ELANG	EN - Englisch
84	Designated EP contracting states	EDS	DE
81	Designated WO countries	WDS	AL, RS, HR, BA, MK
	Published EP/WO documents	EPWOPN	Original document: EP000002036169 Searchable text: EP000002036169 Original document: EP000002036169B1 Searchable text: EP000002036169B1 Original document: WO002007145792 Searchable text: WO002007145792
43	Date of first publication	EVT	Dec 21, 2007
	Date of the first transfer into DPMAregister	EREGT	May 26, 2011
	Date of the (most recent) update in DPMAregister	REGT	Jun 12, 2025 (Show all update days)(Hide all update days) Jun 12, 2025 Due date: changed Jun 11, 2025 Procedures: Procedure relating to EP application, EPO publication of mention of grant , 27.03.2013: new Procedures: Procedure relating to EP application, EPO publication of mention of grant , 27.03.2013: deleted Feb 1, 2025 St.36: changed (technical change) May 26, 2011 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Procedure relating to PCT application	WO first publication without search report	Dec 21, 2007		Details anzeigen
2	Procedure relating to PCT application	WO publication	Dec 21, 2007		Details anzeigen
3	Change of classification	Change of IPC main class	Feb 17, 2009		Details anzeigen
4	Procedure relating to EP application	EPO 1st publication	Mar 18, 2009		Details anzeigen
5	Publications	Publication of a mention regarding EP 1st publication by DPMA	Apr 30, 2009	Apr 30, 2009	Details anzeigen
6	Change of classification	Change of IPC main class	Sep 26, 2012		Details anzeigen
7	Procedure relating to EP application	EPO publication of mention regarding patent grant (beginning of opposition period)	Mar 27, 2013		Details anzeigen
8	Publications	Publication by DPMA of mention regarding EP patent grant	May 16, 2013	May 16, 2013	Details anzeigen
9	Procedure relating to EP application	No opposition to patent grant filed, or opposition proceedings at EPO completed without decision	Jan 3, 2014	Apr 10, 2014	Details anzeigen
10	New applicant/owner details	New applicant/owner details	Jun 23, 2015	Jul 30, 2015	Details anzeigen

View procedures Procedure relating to PCT application (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to PCT application
Legal/procedural status	VST	WO first publication without search report
Date of legal/procedural status	VSTT	Dec 21, 2007

View procedures Procedure relating to PCT application (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to PCT application
Legal/procedural status	VST	WO publication
Date of legal/procedural status	VSTT	Dec 21, 2007

View procedures Change of classification (No.: 3)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Feb 17, 2009
51	IPC main class	ICM (ICMV)	H01S 3/20 (2006.01)
51	Previous IPC main class	ICMF (ICMVF)	H01S 3/20 (2011.01)

View procedures Procedure relating to EP application (No.: 4)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	EPO 1st publication
Date of legal/procedural status	VSTT	Mar 18, 2009

View procedures Publications (No.: 5)
Criterion	Field	Content Close details
Type of procedure	VART	Publications
Legal/procedural status	VST	Publication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural status	VSTT	Apr 30, 2009
Issue number	HN	18
Year	PJ	2009
Publication date	VT	Apr 30, 2009
Type of publication	PART	Bibliographic data

View procedures Change of classification (No.: 6)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Sep 26, 2012
51	IPC main class	ICM (ICMV)	H01S 3/20 (2006.01)
51	Previous IPC main class	ICMF (ICMVF)	H01S 3/20 (2006.01)

View procedures Procedure relating to EP application (No.: 7)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	EPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural status	VSTT	Mar 27, 2013
Date of update of the procedure	REGT	Jun 11, 2025

View procedures Publications (No.: 8)
Criterion	Field	Content Close details
Type of procedure	VART	Publications
Legal/procedural status	VST	Publication by DPMA of mention regarding EP patent grant
Date of legal/procedural status	VSTT	May 16, 2013
Issue number	HN	20
Year	PJ	2013
Publication date	VT	May 16, 2013
Type of publication	PART	Bibliographic data
Part	HT	Part 5

View procedures Procedure relating to EP application (No.: 9)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to EP application
Legal/procedural status	VST	No opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural status	VSTT	Jan 3, 2014
Issue number	HN	15
Year	PJ	2014
Publication date	VT	Apr 10, 2014
Type of publication	PART	Bibliographic data
Part	HT	Part 3

View procedures New applicant/owner details (No.: 10)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Jun 23, 2015
	Issue number	HN	31
	Year	PJ	2015
	Publication date	VT	Jul 30, 2015
	Type of publication	PART	Bibliographic data
	Part	HT	Part 2
71/73	Applicant/owner	INH	Cymer, LLC (n.d.Ges. d.Staates Nevada), San Diego, Kalif., US
71/73	Previous applicant/owner	INHF	Cymer, Inc., San Diego, Calif., US