Register information Patent

DE file number : 60 2007 036 236.9 (Status: pending/in force, Query started: August 8, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2007 036 236.9
96EP file numberEAKZ07 72 9748.9
86WO file numberWAKZPCT/EP2007/055346
97EP publication numberEPN2024994
87WO publication numberWPN2007141191
54Designation/titleTIVERFAHREN ZUR VERHINDERUNG VON METALLVERUNREINIGUNG DURCH EINEN SUBSTRATHALTER
51IPC main classICM
(ICMV)		 H01L 21/687 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 C23C 16/26 (2006.01), C23C 14/06 (2006.01)
22DE application dateDATMay 31, 2007
96EP application dateEATMay 31, 2007
86WO application dateWATMay 31, 2007
43Date of first publicationOTDec 13, 2007
Date of publication of grantPETApr 23, 2014
71/73Applicant/ownerINHSulzer Metaplas GmbH, 51427 Bergisch Gladbach, DE
72InventorINKIRK, Matthew P., Pendleton, NY 14094, US; ACKERMAN, Cyndi, L., Depew, NY 14043, US; DEKEMPENEER, Erik, 2390 Oostmalle, BE; GROENEN, Roland, B-9667 Horebeke, BE; VENKATRAMAN, Chandra, Williamsville, NY 14221, US
74RepresentativeVTRManitz Finsterwald Patent- und Rechtsanwaltspartnerschaft mbB, 80336 München, DE
Address for service Manitz Finsterwald Patent- und Rechtsanwaltspartnerschaft mbB, 80336 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
EP
06114915
Jun 2, 2006
Due dateFT
FG		May 31, 2026
Annual fee for the 20th year Patent fees
Patent division in charge 36
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR
81Designated WO countriesWDSAL, RS, HR, BA, MK
Published EP/WO documentsEPWOPNOriginal document: EP000002024994
Searchable text: EP000002024994
Original document: EP000002024994B1
Searchable text: EP000002024994B1
Original document: WO002007141191
Searchable text: WO002007141191
43Date of first publicationEVTDec 13, 2007
Date of the first transfer into DPMAregisterEREGTMay 27, 2011
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 11, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 23.04.2014: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 23.04.2014: deleted
  • May 27, 2011
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO first publication without search report Dec 13, 2007  Details anzeigen
2 Procedure relating to PCT application WO publication Dec 13, 2007  Details anzeigen
3 Procedure relating to EP application EPO 1st publication Feb 18, 2009  Details anzeigen
4 Procedure relating to EP application EPO publication of search report Feb 18, 2009  Details anzeigen
5 Publications Publication of a mention regarding EP 1st publication by DPMA Apr 2, 2009 Apr 2, 2009 Details anzeigen
6 Change of classification Change of IPC main class Sep 27, 2013  Details anzeigen
7 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Apr 23, 2014  Details anzeigen
8 Publications Publication by DPMA of mention regarding EP patent grant Jun 5, 2014 Jun 5, 2014 Details anzeigen
9 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jan 26, 2015 May 7, 2015 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO first publication without search report
Date of legal/procedural statusVSTTDec 13, 2007
View procedures Procedure relating to PCT application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO publication
Date of legal/procedural statusVSTTDec 13, 2007
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTFeb 18, 2009
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of search report
Date of legal/procedural statusVSTTFeb 18, 2009
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTApr 2, 2009
Issue numberHN14
YearPJ2009
Publication dateVTApr 2, 2009
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTSep 27, 2013
51IPC main classICM
(ICMV)		 H01L 21/687 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 21/683 (2006.01)
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTApr 23, 2014
Date of update of the procedureREGTJun 11, 2025
View procedures Publications (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJun 5, 2014
Issue numberHN23
YearPJ2014
Publication dateVTJun 5, 2014
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJan 26, 2015
Issue numberHN19
YearPJ2015
Publication dateVTMay 7, 2015
Type of publicationPARTBibliographic data
PartHTPart 3