Register information Patent

DE file number : 60 2007 025 393.4 (Status: pending/in force, Query started: August 2, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ60 2007 025 393.4
96EP file numberEAKZ07 25 2132.1
97EP publication numberEPN1865362
54Designation/titleTIReflektierendes Schleifensystem zur Produktion inkohärenter Strahlung
51IPC main classICM
(ICMV)		 G02B 27/48 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01)
22DE application dateDATMay 24, 2007
96EP application dateEATMay 24, 2007
43Date of first publicationOTDec 12, 2007
Date of publication of grantPETSep 12, 2012
71/73Applicant/ownerINHASML Netherlands BV, Veldhoven, NL; Dainippon Screen Mfg. Co., Ltd., Kyoto, JP
72InventorINBaselmans, Johannes Jacobus Matheus, 5688 GG Oirschot, NL; Ueyama, KenjiTenjinkita-cho 1-1, Kyoto 602-8585, JP
Address for service ASML Netherlands BV, 5504 DR VELDHOVEN, NL
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
447289
Jun 6, 2006
Due dateFT
FG		May 31, 2026
Annual fee for the 20th year Patent fees
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
84Designated EP contracting statesEDSDE, FR, GB, IT, NL
Published EP/WO documentsEPWOPNOriginal document: EP000001865362
Searchable text: EP000001865362
Original document: EP000001865362B1
Searchable text: EP000001865362B1
43Date of first publicationEVTDec 12, 2007
Date of the first transfer into DPMAregisterEREGTMay 26, 2011
Date of the (most recent) update in DPMAregisterREGTJun 12, 2025
(Show all update days)(Hide all update days)
  • Jun 12, 2025
    • Due date: changed
  • Jun 11, 2025
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 12.09.2012: new
    • Procedures: Procedure relating to EP application, EPO publication of mention of grant , 12.09.2012: deleted
  • May 26, 2011
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to EP application EPO 1st publication Dec 12, 2007  Details anzeigen
2 Procedure relating to EP application EPO publication of search report Dec 12, 2007  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jan 24, 2008 Jan 24, 2008 Details anzeigen
4 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Sep 12, 2012  Details anzeigen
5 New applicant/owner details New applicant/owner details Sep 12, 2012  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Nov 8, 2012 Nov 8, 2012 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jun 13, 2013 Oct 10, 2013 Details anzeigen
View procedures Procedure relating to EP application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTDec 12, 2007
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of search report
Date of legal/procedural statusVSTTDec 12, 2007
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJan 24, 2008
Issue numberHN4
YearPJ2008
Publication dateVTJan 24, 2008
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTSep 12, 2012
Date of update of the procedureREGTJun 11, 2025
View procedures New applicant/owner details (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTNew applicant/owner details
Legal/procedural statusVSTNew applicant/owner details
Date of legal/procedural statusVSTTSep 12, 2012
71/73Previous applicant/ownerINHFASML Netherlands B.V., Veldhoven, NL, Dainippon Screen Mfg. Co., Ltd., Kyoto, JP
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTNov 8, 2012
Issue numberHN45
YearPJ2012
Publication dateVTNov 8, 2012
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTJun 13, 2013
Issue numberHN41
YearPJ2013
Publication dateVTOct 10, 2013
Type of publicationPARTBibliographic data
PartHTPart 3