Register information Patent

DE file number : 60 2005 025 596.6 (Status: not pending/lapsed, Query started: May 4, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2005 025 596.6
96EP file numberEAKZ05 70 4182.4
86WO file numberWAKZPCT/JP2005/001076
97EP publication numberEPN1713113
87WO publication numberWPN2005074014
54Designation/titleTIBÜHNENANTRIEBSVERFAHREN UND BÜHNENANTRIEBSVORRICHTUNG, BELICHTUNGSVORRICHTUNG UND BAUELEMENTE-HERSTELLUNGSVERFAHREN
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01)
22DE application dateDATJan 27, 2005
96EP application dateEATJan 27, 2005
86WO application dateWATJan 27, 2005
43Date of first publicationOTAug 11, 2005
Date of publication of grantPETDec 29, 2010
71/73Applicant/ownerINHNIKON CORPORATION, Tokyo, JP
72InventorINSHIBAZAKI, Yuichi, Chiyoda-ku, Tokyo 1008331, JP
74RepresentativeVTRHOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, 81925 München, DE
Address for service HOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004025837
Feb 2, 2004
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2004300566
Oct 14, 2004
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
87WO language of publicationWLANGSF - Sonstige Fremdsprache
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR
Published EP/WO documentsEPWOPNOriginal document: EP000001713113
Searchable text: EP000001713113
Original document: EP000001713113B1
Searchable text: EP000001713113B1
Original document: WO002005074014
Searchable text: WO002005074014
43Date of first publicationEVTAug 11, 2005
Date of the first transfer into DPMAregisterEREGTSep 30, 2012
Date of the (most recent) update in DPMAregisterREGTOct 21, 2020
(Show all update days)(Hide all update days)
  • Oct 21, 2020; Sep 16, 2020; Aug 12, 2019; Feb 9, 2019; Jan 24, 2019; Oct 29, 2018; Jan 27, 2018; Feb 7, 2017; Jan 30, 2016; Jan 31, 2015; Feb 8, 2014; Feb 1, 2014; Feb 8, 2013; Feb 2, 2013; Jan 29, 2013
    • Historical data not available for this/these date(s)
  • Sep 30, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO first publication without search report Aug 11, 2005  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Oct 18, 2006  Details anzeigen
3 Procedure relating to EP application EPO publication of search report Oct 18, 2006  Details anzeigen
4 Publications Publication of a mention regarding EP 1st publication by DPMA Nov 30, 2006 Nov 30, 2006 Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Dec 29, 2010  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Feb 10, 2011 Feb 10, 2011 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Sep 30, 2011 Jan 26, 2012 Details anzeigen
8 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Aug 1, 2020 Oct 22, 2020 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO first publication without search report
Date of legal/procedural statusVSTTAug 11, 2005
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTOct 18, 2006
View procedures Procedure relating to EP application (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of search report
Date of legal/procedural statusVSTTOct 18, 2006
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTNov 30, 2006
Issue numberHN48
YearPJ2006
Publication dateVTNov 30, 2006
Type of publicationPARTBibliographic data
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTDec 29, 2010
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTFeb 10, 2011
Issue numberHN6
YearPJ2011
Publication dateVTFeb 10, 2011
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTSep 30, 2011
Issue numberHN4
YearPJ2012
Publication dateVTJan 26, 2012
Type of publicationPARTBibliographic data
PartHTPart 3
View procedures Administrative procedure (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTApplication is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural statusVSTTAug 1, 2020
Issue numberHN43
YearPJ2020
Publication dateVTOct 22, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTOct 21, 2020