Register information Patent

DE file number : 60 2004 020 230.4 (Status: not pending/lapsed, Query started: May 27, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2004 020 230.4
96EP file numberEAKZ04 77 7530.9
86WO file numberWAKZPCT/US2004/021459
97EP publication numberEPN1646913
87WO publication numberWPN2005008747
54Designation/titleTIVERFAHREN ZUR INSPEKTION VON WAFERN UND RETIKELN UNTER VERWENDUNG VON ENTWICKLER-ABSICHTSDATEN
51IPC main classICM
(ICMV)		 G03F 1/00 (2012.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01), G01N 21/956 (2006.01)
22DE application dateDATJul 2, 2004
96EP application dateEATJul 2, 2004
86WO application dateWATJul 2, 2004
43Date of first publicationOTJan 27, 2005
Date of publication of grantPETMar 25, 2009
71/73Applicant/ownerINHKla-Tencor Technologies Corp., Milpitas, Calif., US
72InventorINMARELLA, Paul Frank, San Jose, CA 95129, US; MCCAULEY, Sharon, San Jose, CA 95132, US; CHANG, Ellis, Saratoga, CA 95070, US; VOLK, William, San Francisco, CA 94123, US; WILEY, James, Menlo Park, CA 94025, US; WATSON, Sterling, Palo Alto, CA 94301, US; KEKARE, Sagar A., Plano, TX 75024, US; HESS, Carl, Los Altos, CA 94024, US
74RepresentativeVTRLohr, Jöstingmeier & Partner Patent- und Rechtsanwälte, 82178 Puchheim, DE
Address for service Lohr, Jöstingmeier & Partner Patent- und Rechtsanwälte, 82178 Puchheim, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
485338 P
Jul 3, 2003
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
883372
Jul 1, 2004
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
87WO language of publicationWLANGEN - Englisch
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR
Published EP/WO documentsEPWOPNOriginal document: EP000001646913
Searchable text: EP000001646913
Original document: EP000001646913B1
Searchable text: EP000001646913B1
Original document: WO002005008747
Searchable text: WO002005008747
43Date of first publicationEVTJan 27, 2005
Date of the first transfer into DPMAregisterEREGTSep 29, 2012
Date of the (most recent) update in DPMAregisterREGTJul 27, 2023
(Show all update days)(Hide all update days)
  • Jul 27, 2023; Jun 17, 2023; Jun 15, 2023; Apr 29, 2020; Mar 19, 2020; Oct 19, 2018; Aug 14, 2018; Aug 11, 2017; Aug 9, 2017; Aug 9, 2016; Aug 12, 2015; Aug 11, 2014; Aug 15, 2013; Aug 8, 2013; Jan 28, 2013
    • Historical data not available for this/these date(s)
  • Sep 29, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO first publication without search report Jan 27, 2005  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Apr 19, 2006  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jun 1, 2006 Jun 1, 2006 Details anzeigen
4 Change of classification Change of IPC main class Jan 29, 2008  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Mar 25, 2009  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant May 7, 2009 May 7, 2009 Details anzeigen
7 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Dec 29, 2009 Apr 15, 2010 Details anzeigen
8 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Feb 1, 2020 Apr 30, 2020 Details anzeigen
9 Publications Other <with further information such as lien, etc> Jul 27, 2023 Jul 27, 2023 Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO first publication without search report
Date of legal/procedural statusVSTTJan 27, 2005
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTApr 19, 2006
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJun 1, 2006
Issue numberHN22
YearPJ2006
Publication dateVTJun 1, 2006
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTJan 29, 2008
51IPC main classICM
(ICMV)		 G03F 1/00 (2012.01)
51Previous IPC main classICMF
(ICMVF)		 G03F 1/00 (2000.01)
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTMar 25, 2009
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTMay 7, 2009
Issue numberHN19
YearPJ2009
Publication dateVTMay 7, 2009
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Procedure relating to EP application (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTNo opposition to patent grant filed, or opposition proceedings at EPO completed without decision
Date of legal/procedural statusVSTTDec 29, 2009
Issue numberHN15
YearPJ2010
Publication dateVTApr 15, 2010
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTJun 15, 2023
View procedures Administrative procedure (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTApplication is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
Date of legal/procedural statusVSTTFeb 1, 2020
Issue numberHN18
YearPJ2020
Publication dateVTApr 30, 2020
Type of publicationPARTBibliographic data
PartHTPart 3
View procedures Publications (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTOther <with further information such as lien, etc>
Date of legal/procedural statusVSTTJul 27, 2023
Issue numberHN30
YearPJ2023
Publication dateVTJul 27, 2023
Type of publicationPARTBibliographic data
PartHTPart 5
Supplementary informationINFODer doppelte Eintrag im DPMAregister: Einspruchsfrist ist abgelaufen, ohne dass Einspruch erhoben wurde, wurde entfernt.
Date of update of the procedureREGTJul 27, 2023