Register information Patent

DE file number : 60 2004 047 048.1 (Status: not pending/lapsed, Query started: September 18, 2024)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ60 2004 047 048.1
96EP file numberEAKZ04 71 4910.9
86WO file numberWAKZPCT/JP2004/002295
97EP publication numberEPN1598855
87WO publication numberWPN2004086468
54Designation/titleTIBELICHTUNGSVORRICHTUNG UND VERFAHREN UND VERFAHREN ZUR HERSTELLUNG EINER VORRICHTUNG
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01)
22DE application dateDATFeb 26, 2004
96EP application dateEATFeb 26, 2004
86WO application dateWATFeb 26, 2004
43Date of first publicationOTOct 7, 2004
Date of publication of grantPETApr 22, 2015
71/73Applicant/ownerINHNikon Corp., Tokio/Tokyo, JP
72InventorINOwa, Soichi, Chiyoda-ku,Tokyo 100-8331, JP; Nagasaka, Hiroyuki, Chiyoda-ku,Tokyo 100-8331, JP; Nishii, Yasufumi, Chiyoda-ku,Tokyo 100-8331, JP
74RepresentativeVTRHOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, 81925 München, DE
Address for service HOFFMANN - EITLE Patent- und Rechtsanwälte PartmbB, 81925 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2003110748
Apr 15, 2003
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2003049365
Feb 26, 2003
33
31
32
Foreign priorityPRC
PRNA
PRDA
JP
2003320100
Sep 11, 2003
Patent division in charge 33
97EP language of publicationELANGEN - Englisch
87WO language of publicationWLANGSF - Sonstige Fremdsprache
84Designated EP contracting statesEDSAT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR
81Designated WO countriesWDSLT, AL, LV, MK
Published EP/WO documentsEPWOPNOriginal document: EP000001598855
Searchable text: EP000001598855
Original document: EP000001598855B1
Searchable text: EP000001598855B1
Original document: WO002004086468
Searchable text: WO002004086468
43Date of first publicationEVTOct 7, 2004
Date of the first transfer into DPMAregisterEREGTMay 27, 2011
Date of the (most recent) update in DPMAregisterREGTJun 1, 2023
(Show all update days)(Hide all update days)
  • Jun 1, 2023; Nov 25, 2020; Oct 17, 2020; Aug 13, 2019; Feb 16, 2019; Oct 25, 2018; Feb 27, 2018; Oct 5, 2017; Mar 2, 2017; May 4, 2016; Mar 31, 2016; Mar 9, 2016; Mar 1, 2016; Jun 3, 2015; Apr 28, 2015; Apr 23, 2015; Apr 21, 2015; Jan 27, 2013
    • Historical data not available for this/these date(s)
  • May 27, 2011
    • Date of the first transfer into DPMAregister
Procedural data
No. Kind of procedure Legal status Date of legal/procedural status Date of legal/procedural status sorted ascending Date of first publication Display all details
1 Procedure relating to PCT application WO first publication without search report Oct 7, 2004   Display details
2 Procedure relating to PCT application WO publication Oct 7, 2004   Display details
3 Procedure relating to EP application EPO 1st publication Nov 23, 2005   Display details
4 Procedure relating to EP application EPO publication of search report Nov 23, 2005   Display details
5 Publications Publication of a mention regarding EP 1st publication by DPMA Dec 29, 2005 Dec 29, 2005 Display details
6 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) Apr 22, 2015   Display details
7 New applicant/owner details New applicant/owner details Apr 27, 2015   Display details
8 Publications Publication by DPMA of mention regarding EP patent grant Jun 3, 2015 Jun 3, 2015 Display details
9 Procedure relating to EP application No opposition to patent grant filed, or opposition proceedings at EPO completed without decision Jan 25, 2016 May 4, 2016 Display details
10 Administrative procedure Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee Sep 1, 2020 Nov 26, 2020 Display details