Master data| INID | Criterion | Field | Content |
|---|
| Type of IP right | SART | Patent |
| Status | ST | Not pending/lapsed |
| 21 | DE file number | DAKZ | 603 36 920.0 |
| 96 | EP file number | EAKZ | 03 78 3399.3 |
| 86 | WO file number | WAKZ | PCT/US03/36223 |
| 97 | EP publication number | EPN | 1561239 |
| 87 | WO publication number | WPN | 2004044963 |
| 54 | Designation/title | TI | VERFAHREN ZUR ATOMSCHICHTABSCHEIDUNG |
| 51 | IPC main class | ICM
(ICMV) | H01L 21/285 (2006.01) |
| 22 | DE application date | DAT | Nov 12, 2003 |
| 96 | EP application date | EAT | Nov 12, 2003 |
| 86 | WO application date | WAT | Nov 12, 2003 |
| 43 | Date of first publication | OT | May 27, 2004 |
| Date of publication of grant | PET | Apr 27, 2011 |
| 71/73 | Applicant/owner | INH | Micron Technology, Inc., Boise, Id., US |
| 72 | Inventor | IN | DOAN, Trung, Tri, Los Gaton, CA 95032, US; BLALOCK, Guy, T., Eagle, ID 83616, US; SANDHU, Gurtej, S., Boise, ID 83706, US |
| 74 | Representative | VTR | Marks & Clerk (Luxembourg) LLP, Luxembourg, LU |
| Address for service | | Marks & Clerk (Luxembourg) LLP, 1017 LUXEMBOURG, LU |
33
31
32
| Foreign priority | PRC
PRNA
PRDA
| US
293072
Nov 12, 2002
|
| Patent division in charge | | 33 |
| 97 | EP language of publication | ELANG | EN - Englisch |
| 87 | WO language of publication | WLANG | EN - Englisch |
| 84 | Designated EP contracting states | EDS | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR |
| Published EP/WO documents | EPWOPN | Original document:
EP000001561239
Searchable text:
EP000001561239
Original document:
EP000001561239B1
Searchable text:
EP000001561239B1
Original document:
WO002004044963
Searchable text:
WO002004044963 |
| 43 | Date of first publication | EVT | May 27, 2004 |
| Date of the first transfer into DPMAregister | EREGT | Sep 29, 2012 |
| Date of the (most recent) update in DPMAregister | REGT | Aug 21, 2019
(Show all update days)(Hide all update days)- Aug 21, 2019; Aug 6, 2019; Jul 18, 2019; Mar 20, 2019; Oct 25, 2018; Nov 21, 2017; Nov 24, 2016; Nov 18, 2015; Nov 25, 2014; Dec 10, 2013; Nov 21, 2013; Jan 27, 2013; Dec 5, 2012; Nov 21, 2012
- Historical data not available for this/these date(s)
- Sep 29, 2012
- Date of the first transfer into DPMAregister
|
Procedural data| No. |
Kind of procedure
|
Legal status
|
Date of legal/procedural status
 |
Date of first publication
| Display all details |
|---|
| 1 |
Procedure relating to PCT application
|
WO first publication without search report
|
May 27, 2004
| |
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|
| 2 |
Procedure relating to EP application
|
EPO 1st publication
|
Aug 10, 2005
| |
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|
| 3 |
Publications
|
Publication of a mention regarding EP 1st publication by DPMA
|
Sep 15, 2005
|
Sep 15, 2005 |
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|
| 4 |
Change of classification
|
Change of IPC main class
|
Oct 17, 2005
| |
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|
| 5 |
Procedure relating to EP application
|
EPO publication of mention regarding patent grant (beginning of opposition period)
|
Apr 27, 2011
| |
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|
| 6 |
Publications
|
Publication by DPMA of mention regarding EP patent grant
|
Jun 9, 2011
|
Jun 9, 2011 |
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|
| 7 |
Procedure relating to EP application
|
No opposition to patent grant filed, or opposition proceedings at EPO completed without decision
|
Jan 30, 2012
|
May 24, 2012 |
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|
| 8 |
Administrative procedure
|
Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
|
Jun 1, 2019
|
Aug 22, 2019 |
Display details
|
