Register information Patent

DE file number : 603 32 429.0 (Status: not pending/lapsed, Query started: May 5, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTNot pending/lapsed
21DE file number DAKZ603 32 429.0
96EP file numberEAKZ03 74 4207.6
86WO file numberWAKZPCT/US03/06825
97EP publication numberEPN1481288
87WO publication numberWPN2003077038
54Designation/titleTIEXTREM-ULTRAVIOLET-LITHOGRAPHISCHE ELEMENTE MIT VERRINGERTEN SCHLIEREN UND VERFAHREN ZUR HERSTELLUNG DERSELBEN
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
22DE application dateDATMar 4, 2003
96EP application dateEATMar 4, 2003
86WO application dateWATMar 4, 2003
43Date of first publicationOTSep 18, 2003
Date of publication of grantPETMay 5, 2010
71/73Applicant/ownerINHCorning Inc., Corning, N.Y., US
72InventorINHRDINA, Kenneth E, Horseheads, NY 14845, US; MAXON, John E, Canton, NY 13617, US; MCLEAN, Brent R, Canton, NY 13617, US
74RepresentativeVTRisarpatent - Patent- und Rechtsanwälte Barth Charles Hassa Peckmann & Partner mbB, 80801 München, DE
Address for service isarpatent - Patent- und Rechtsanwälte Barth Charles Hassa Peckmann & Partner mbB, 80801 München, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
362052 P
Mar 5, 2002
Patent division in charge 51
97EP language of publicationELANGEN - Englisch
87WO language of publicationWLANGEN - Englisch
84Designated EP contracting statesEDSDE, FR, GB, IT, NL
Published EP/WO documentsEPWOPNOriginal document: EP000001481288
Searchable text: EP000001481288
Original document: EP000001481288B1
Searchable text: EP000001481288B1
Original document: WO002003077038
Searchable text: WO002003077038
43Date of first publicationEVTSep 18, 2003
Date of the first transfer into DPMAregisterEREGTSep 29, 2012
Date of the (most recent) update in DPMAregisterREGTMar 7, 2023
(Show all update days)(Hide all update days)
  • Mar 7, 2023; Apr 30, 2022; Feb 15, 2022; Sep 14, 2021; Feb 17, 2021; Dec 8, 2020; Nov 24, 2020; Feb 21, 2020; Aug 16, 2019; May 26, 2019; Feb 21, 2019; Oct 25, 2018; Jun 9, 2018; Mar 21, 2018; Apr 12, 2017; Apr 11, 2017; Dec 31, 2016; Apr 15, 2016; Apr 9, 2015; Oct 30, 2014; Sep 25, 2014; Apr 19, 2014; Apr 8, 2014; Apr 16, 2013; Apr 10, 2013; Jan 27, 2013
    • Historical data not available for this/these date(s)
  • Sep 29, 2012
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Procedure relating to PCT application WO first publication without search report Sep 18, 2003  Details anzeigen
2 Procedure relating to EP application EPO 1st publication Dec 1, 2004  Details anzeigen
3 Publications Publication of a mention regarding EP 1st publication by DPMA Jan 5, 2005 Jan 5, 2005 Details anzeigen
4 Change of classification Change of IPC main class Oct 17, 2005  Details anzeigen
5 Procedure relating to EP application EPO publication of mention regarding patent grant (beginning of opposition period) May 5, 2010  Details anzeigen
6 Publications Publication by DPMA of mention regarding EP patent grant Jun 17, 2010 Jun 17, 2010 Details anzeigen
7 Opposition procedure Opposition to patent filed Feb 4, 2011 Apr 28, 2011 Details anzeigen
8 Opposition procedure Patent maintained full by EPO Mar 18, 2014  Details anzeigen
9 Opposition procedure Decision by EPO to maintain patent in full has become final Mar 18, 2014 Oct 30, 2014 Details anzeigen
10 Administrative procedure IP right lapsed through expiry of term of protection Mar 4, 2023  Details anzeigen
View procedures Procedure relating to PCT application (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to PCT application
Legal/procedural statusVSTWO first publication without search report
Date of legal/procedural statusVSTTSep 18, 2003
View procedures Procedure relating to EP application (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO 1st publication
Date of legal/procedural statusVSTTDec 1, 2004
View procedures Publications (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of a mention regarding EP 1st publication by DPMA
Date of legal/procedural statusVSTTJan 5, 2005
Issue numberHN1
YearPJ2005
Publication dateVTJan 5, 2005
Type of publicationPARTBibliographic data
View procedures Change of classification (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTOct 17, 2005
51IPC main classICM
(ICMV)		 G03F 7/20 (2006.01)
51Previous IPC main classICMF
(ICMVF)		 G03F 7/20 (2000.01)
View procedures Procedure relating to EP application (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTProcedure relating to EP application
Legal/procedural statusVSTEPO publication of mention regarding patent grant (beginning of opposition period)
Date of legal/procedural statusVSTTMay 5, 2010
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication by DPMA of mention regarding EP patent grant
Date of legal/procedural statusVSTTJun 17, 2010
Issue numberHN24
YearPJ2010
Publication dateVTJun 17, 2010
Type of publicationPARTBibliographic data
PartHTPart 5
View procedures Opposition procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTOpposition procedure
Legal/procedural statusVSTOpposition to patent filed
Date of legal/procedural statusVSTTFeb 4, 2011
Issue numberHN17
YearPJ2011
Publication dateVTApr 28, 2011
Type of publicationPARTBibliographic data
PartHTPart 3
View procedures Opposition procedure (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTOpposition procedure
Legal/procedural statusVSTPatent maintained full by EPO
Date of legal/procedural statusVSTTMar 18, 2014
Date of update of the procedureREGTApr 30, 2022
View procedures Opposition procedure (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTOpposition procedure
Legal/procedural statusVSTDecision by EPO to maintain patent in full has become final
Date of legal/procedural statusVSTTMar 18, 2014
Issue numberHN44
YearPJ2014
Publication dateVTOct 30, 2014
Type of publicationPARTBibliographic data
PartHTPart 3
Date of update of the procedureREGTApr 30, 2022
View procedures Administrative procedure (No.: 10)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTIP right lapsed through expiry of term of protection
Date of legal/procedural statusVSTTMar 4, 2023
Date of update of the procedureREGTMar 7, 2023