Master dataINID | Criterion | Field | Content |
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| Type of IP right | SART | Patent |
| Status | ST | Not pending/lapsed |
21 | DE file number | DAKZ | 602 40 602.1 |
96 | EP file number | EAKZ | 02 25 4507.3 |
97 | EP publication number | EPN | 1286217 |
54 | Designation/title | TI | Rohling für Phasenschiebermaske, deren Herstellung und Gebrauch |
51 | IPC main class | ICM (ICMV) | G03F 1/00 (2012.01) |
51 | IPC secondary class(es) | ICS (ICSV) | G03F 1/08 (2006.01) |
22 | DE application date | DAT | Jun 26, 2002 |
96 | EP application date | EAT | Jun 26, 2002 |
43 | Date of first publication | OT | Feb 26, 2003 |
| Date of publication of grant | PET | Jul 27, 2011 |
71/73 | Applicant/owner | INH | Shin-Etsu Chemical Co., Ltd., Tokyo, JP |
72 | Inventor | IN | Tsukamoto, Tetsushi,, Nakakubiki-gun,Niigata-ken, JP; Inazuki, Yukio,, Nakakubiki-gun,Niigata-ken, JP; Kaneko, Hideo,, Nakakubiki-gun,Niigata-ken, JP; Okazaki, Satoshi,, Nakakubiki-gun,Niigata-ken, JP |
74 | Representative | VTR | Leinweber & Zimmermann Patentanwalts-PartG mbB, 80331 München, DE |
| Address for service | | Leinweber & Zimmermann Patentanwalts-PartG mbB, 80331 München, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| JP 2001192958 Jun 26, 2001
|
| Patent division in charge | | 51 |
97 | EP language of publication | ELANG | EN - Englisch |
84 | Designated EP contracting states | EDS | DE, FR, GB |
| Published EP/WO documents | EPWOPN | Original document:
EP000001286217 Searchable text:
EP000001286217 Original document:
EP000001286217B1 Searchable text:
EP000001286217B1 |
43 | Date of first publication | EVT | Feb 26, 2003 |
| Date of the first transfer into DPMAregister | EREGT | May 26, 2011 |
| Date of the (most recent) update in DPMAregister | REGT | Jun 28, 2022 (Show all update days)(Hide all update days)- Jun 28, 2022; Jun 11, 2021; Sep 2, 2020; Jun 19, 2020; Aug 21, 2019; Jun 26, 2019; May 16, 2019; Jun 26, 2018; Jul 11, 2017; Jul 5, 2016; Jul 9, 2015; Jul 8, 2015; Jul 16, 2014; Jul 9, 2014; Jul 1, 2014; Aug 7, 2013; Jul 9, 2013; Jul 5, 2013; Jan 24, 2013; Aug 23, 2012; Jul 10, 2012; Jun 29, 2012; Oct 4, 2011; Sep 15, 2011; Sep 9, 2011; Sep 1, 2011; Aug 31, 2011; Jul 28, 2011; Jul 26, 2011; Jul 22, 2011; Jul 21, 2011
- Historical data not available for this/these date(s)
- May 26, 2011
- Date of the first transfer into DPMAregister
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Procedural dataNo. |
Kind of procedure
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Legal status
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Date of legal/procedural status
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Date of first publication
| Display all details |
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1 |
Procedure relating to EP application
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EPO 1st publication
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Feb 26, 2003
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2 |
Publications
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Publication of a mention regarding EP 1st publication by DPMA
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Apr 3, 2003
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Apr 3, 2003 |
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3 |
Change of classification
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Change of IPC main class
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Oct 17, 2005
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4 |
New applicant/owner details
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New applicant/owner details
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Jul 21, 2011
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5 |
Procedure relating to EP application
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EPO publication of mention regarding patent grant (beginning of opposition period)
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Jul 27, 2011
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6 |
Publications
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Publication of a mention regarding EP 1st publication by DPMA
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Sep 8, 2011
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Sep 8, 2011 |
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7 |
Publications
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Publication by DPMA of mention regarding EP patent grant
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Sep 15, 2011
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Sep 15, 2011 |
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8 |
Procedure relating to EP application
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No opposition to patent grant filed, or opposition proceedings at EPO completed without decision
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May 2, 2012
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Aug 23, 2012 |
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9 |
Administrative procedure
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IP right lapsed through expiry of term of protection
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Jun 26, 2022
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