Master data| INID | Criterion | Field | Content |
|---|
| Type of IP right | SART | Patent |
| Status | ST | Not pending/lapsed |
| 21 | DE file number | DAKZ | 601 48 582.3 |
| 96 | EP file number | EAKZ | 01 87 0205.0 |
| 97 | EP publication number | EPN | 1195801 |
| 54 | Designation/title | TI | Verfahren zur Behandlung einer Isolierschicht mit niedriger Dielektrizitätskonstante |
| 51 | IPC main class | ICM
(ICMV) | H01L 21/321 (2006.01) |
| 51 | IPC secondary class(es) | ICS
(ICSV) | H01L 21/768 (2006.01), H01L 21/316 (2006.01), H01L 23/532 (2006.01) |
| 22 | DE application date | DAT | Sep 28, 2001 |
| 96 | EP application date | EAT | Sep 28, 2001 |
| 43 | Date of first publication | OT | Apr 10, 2002 |
| Date of publication of grant | PET | Jan 29, 2014 |
| 71/73 | Applicant/owner | INH | Applied Materials, Inc., Santa Clara, Calif., US; IMEC, Leuven, BE |
| 72 | Inventor | IN | Baklanov, Michael R., 3000 Leuven, BE; Vanhaelemeersch, Serge, 3001 Leuven, BE; Maex, Karen A., 3020 Herent, BE; Schaekers, Marc, 3001 Heverlee, BE; Struyf, Herbert, 2018 Antwerpen, BE; Donaton, Ricardo, 3001 Heverlee, BE |
| Address for service | | IMEC, 3001 LEUVEN, BE |
33
31
32
| Foreign priority | PRC
PRNA
PRDA
| US
236569
Sep 29, 2000
|
| Patent division in charge | | 33 |
| 97 | EP language of publication | ELANG | EN - Englisch |
| 84 | Designated EP contracting states | EDS | DE, FR, GB |
| Published EP/WO documents | EPWOPN | Original document:
EP000001195801
Searchable text:
EP000001195801
Original document:
EP000001195801B1
Searchable text:
EP000001195801B1 |
| 43 | Date of first publication | EVT | Apr 10, 2002 |
| Date of the first transfer into DPMAregister | EREGT | May 26, 2011 |
| Date of the (most recent) update in DPMAregister | REGT | Jan 7, 2024
(Show all update days)(Hide all update days)- Jan 7, 2024; Jul 5, 2018; May 22, 2018; Oct 11, 2017; Aug 31, 2016; Sep 3, 2015; Aug 25, 2015; Feb 12, 2015; Jan 8, 2015; Sep 3, 2014; Mar 6, 2014; Mar 4, 2014; Feb 27, 2014; Jan 31, 2014; Jan 30, 2014; Jan 23, 2013; May 31, 2011
- Historical data not available for this/these date(s)
- May 26, 2011
- Date of the first transfer into DPMAregister
|
Procedural data| No. |
Kind of procedure
|
Legal status
|
Date of legal/procedural status
 |
Date of first publication
| Display all details |
|---|
| 1 |
Procedure relating to EP application
|
EPO 1st publication
|
Apr 10, 2002
| |
Display details
|
| 2 |
Procedure relating to EP application
|
EPO publication of search report
|
Apr 10, 2002
| |
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|
| 3 |
Publications
|
Publication of a mention regarding EP 1st publication by DPMA
|
May 16, 2002
|
May 16, 2002 |
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| 4 |
Change of classification
|
Change of IPC main class
|
Oct 17, 2005
| |
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|
| 5 |
Procedure relating to EP application
|
EPO publication of mention regarding patent grant (beginning of opposition period)
|
Jan 29, 2014
| |
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|
| 6 |
New applicant/owner details
|
New applicant/owner details
|
Jan 29, 2014
| |
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|
| 7 |
Publications
|
Publication by DPMA of mention regarding EP patent grant
|
Mar 6, 2014
|
Mar 6, 2014 |
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|
| 8 |
Procedure relating to EP application
|
No opposition to patent grant filed, or opposition proceedings at EPO completed without decision
|
Oct 30, 2014
|
Feb 12, 2015 |
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|
| 9 |
Administrative procedure
|
Application is deemed to be withdrawn due to non-payment of annual fee/ IP right has lapsed due to non-payment of annual fee
|
Apr 4, 2018
|
Jul 5, 2018 |
Display details
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