Register information Patent

DE file number : 11 2021 005 916.5 (Status: pending/in force, Query started: October 25, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Pending/in force
21	DE file number	DAKZ	11 2021 005 916.5
86	WO file number	WAKZ	PCT/EP2021/079621
87	WO publication number	WPN	2022100998
54	Designation/title	TI	VERFAHREN UND COMPUTERPROGRAMME ZUR KONFIGURATION EINES STICHPROBENPLAN-ERZEUGUNGSMODELLS
51	IPC main class	ICM (ICMV)	G03F 7/20 (2006.01)
22	DE application date	DAT	Oct 26, 2021
85	PCT national phase entry patent	PATNAT	Jun 12, 2023
86	WO application date	WAT	Oct 26, 2021
43	Date of first publication	OT	May 19, 2022
71/73	Applicant/owner	INH	ASML Netherlands B.V., Veldhoven, NL
72	Inventor	IN	Werkman, Roy, Veldhoven, NL; Wildenberg, Jochem Sebastiaan, Veldhoven, NL; Sahraeian, Reza, Veldhoven, NL
74	Representative	VTR	Murgitroyd Germany Patentanwaltsgesellschaft mbH, 80636 München, DE
10	Published DE documents	DEPN	Original document: DE112021005916T5 Searchable text: DE112021005916T5
	Address for service		Murgitroyd Germany Patentanwaltsgesellschaft mbH, 80636 München, DE
33 31 32	Foreign priority	PRC PRNA PRDA	EP 20206977.9 Nov 11, 2020
	Due date	FT FG	Oct 31, 2025 Annual fee for the 5th year Patent fees
	Patent division in charge		51
87	WO language of publication	WLANG	EN - Englisch
57	Abstract	AB	A method to infer a current sampling scheme for one or more current substrates is provided, the method comprising: obtaining a first model trained to infer an optimal sampling scheme based on inputting context and/or pre-exposure data associated with one or more previous substrates, wherein the first model is trained in dependency of an outcome of a second model configured to discriminate between the inferred optimal sampling scheme and a pre-determined optimal sampling scheme; and using the obtained first model to infer the current sampling scheme based on inputting context and/or pre-exposure data associated with the one or more current substrate.
81	Designated WO countries	WDS	AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, IT, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, WS, ZA, ZM, ZW
	Published EP/WO documents	EPWOPN	Original document: WO002022100998A1 Searchable text: WO002022100998A1
56	Citations	CT	[A] US020190067060A1 (US 2019 / 0 067 060 A1) [A] US020200151600A1 (US 2020 / 0 151 600 A1) [A] US020190137892A1 (US 2019 / 0 137 892 A1) [A] US020180189964A1 (US 2018 / 0 189 964 A1)
43	Date of first publication	EVT	May 19, 2022
	Number of official communications (office actions)		1
	Number of responses		1
	Date of the first transfer into DPMAregister	EREGT	Aug 24, 2023
	Date of the (most recent) update in DPMAregister	REGT	Oct 18, 2025 (Show all update days)(Hide all update days) Oct 18, 2025 Number of responses: changed Procedures: Examination procedure, Reply to official communication received, 15.10.2025: new Aug 28, 2025 Citations: new Number of official communications (office actions): changed Procedures: Examination procedure, Official communication on examination issued, 27.08.2025: new Jun 25, 2025 St.36: changed (technical change) Nov 8, 2024 Due date: changed Aug 25, 2024 St.36: changed (technical change) May 24, 2024; Nov 10, 2023 Historical data not available for this/these date(s) Aug 24, 2023 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Pre-registration procedure	The application is under preliminary examination	Oct 26, 2021		Details anzeigen
2	Procedure relating to PCT application	WO first publication with search report	May 19, 2022		Details anzeigen
3	Examination procedure	Request for examination effectively filed	May 22, 2023		Details anzeigen
4	Pre-registration procedure	Pre-registration procedure has been concluded	Jul 18, 2023		Details anzeigen
5	Pre-registration procedure	Closing PCT nationale phase entry	Jul 18, 2023		Details anzeigen
6	Publications	Publication of translation of PCT application	Aug 24, 2023	Aug 24, 2023	Details anzeigen
7	Examination procedure	Official communication on examination	Aug 27, 2025		Details anzeigen
8	Examination procedure	Reply to official communication	Oct 15, 2025		Details anzeigen

View procedures Pre-registration procedure (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	The application is under preliminary examination
Date of legal/procedural status	VSTT	Oct 26, 2021
Date of update of the procedure	REGT	Aug 24, 2023

View procedures Procedure relating to PCT application (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to PCT application
Legal/procedural status	VST	WO first publication with search report
Date of legal/procedural status	VSTT	May 19, 2022
Date of update of the procedure	REGT	Aug 24, 2023

View procedures Examination procedure (No.: 3)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Request for examination effectively filed
Date of legal/procedural status	VSTT	May 22, 2023
Third party request		No
Date of receipt	AEGT	May 22, 2023
Date of update of the procedure	REGT	Aug 24, 2023

View procedures Pre-registration procedure (No.: 4)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Pre-registration procedure has been concluded
Date of legal/procedural status	VSTT	Jul 18, 2023
Date of update of the procedure	REGT	Aug 24, 2023

View procedures Pre-registration procedure (No.: 5)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Closing PCT nationale phase entry
Date of legal/procedural status	VSTT	Jul 18, 2023
Date of update of the procedure	REGT	Aug 24, 2023

View procedures Publications (No.: 6)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Publication of translation of PCT application
	Date of legal/procedural status	VSTT	Aug 24, 2023
	Issue number	HN	34
	Year	PJ	2023
	Publication date	VT	Aug 24, 2023
	Type of publication	PART	Documents
	Part	HT	Part 6
10	Published DE documents	DEPN	Original document: DE112021005916T5 Searchable text: DE112021005916T5
	Date of update of the procedure	REGT	Aug 24, 2023

View procedures Examination procedure (No.: 7)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Official communication on examination
Date of legal/procedural status	VSTT	Aug 27, 2025
Date of update of the procedure	REGT	Aug 28, 2025

View procedures Examination procedure (No.: 8)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Reply to official communication
Date of legal/procedural status	VSTT	Oct 15, 2025
Date of update of the procedure	REGT	Oct 18, 2025