Register information Patent

DE file number : 11 2018 002 981.6 (Status: pending/in force, Query started: August 7, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Pending/in force
21	DE file number	DAKZ	11 2018 002 981.6
86	WO file number	WAKZ	PCT/US2018/035097
87	WO publication number	WPN	2018231522
54	Designation/title	TI	SILIZIUMOXYNITRID-BASIERTE KAPSELUNGSSCHICHT FÜR MAGNETISCHE TUNNELÜBERGÄNGE
51	IPC main class	ICM (ICMV)	H10B 61/00 (2023.01)
51	IPC secondary class(es)	ICS (ICSV)	C23C 16/30 (2006.01), H10N 50/01 (2023.01)
22	DE application date	DAT	May 30, 2018
85	PCT national phase entry patent	PATNAT	Dec 12, 2019
86	WO application date	WAT	May 30, 2018
43	Date of first publication	OT	Dec 20, 2018
71/73	Applicant/owner	INH	Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72	Inventor	IN	Sundar, Vignesh, Sunnyvale, CA, US; Wang, Yu-Jen, San Jose, CA, US; Shen, Dongna, San Jose, CA, US; Patel, Sahil, Fremont, CA, US; Tong, Ru-Ying, Los Gatos, CA, US
74	Representative	VTR	BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10	Published DE documents	DEPN	Original document: DE112018002981T5 Searchable text: DE112018002981T5
	Address for service		BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33 31 32	Foreign priority	PRC PRNA PRDA	US 15/619,825 Jun 12, 2017
	Due date	FT FG	May 31, 2026 Annual fee for the 9th year Patent fees
	Patent division in charge		33
87	WO language of publication	WLANG	EN - Englisch
57	Abstract	AB	A plasma enhanced chemical vapor deposition (PECVD) method is disclosed for forming a SiON encapsulation layer on a magnetic tunnel junction (MTJ) sidewall that minimizes attack on the MTJ sidewall during the PECVD or subsequent processes. The PECVD method provides a higher magnetoresistive ratio for the MTJ than conventional methods after a 400°C anneal. In one embodiment, the SiON encapsulation layer is deposited using a N
81	Designated WO countries	WDS	AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
	Published EP/WO documents	EPWOPN	Original document: WO2018231522A1 Searchable text: WO2018231522A1
56	Citations	CT	US020050167787A1 (US 2005 / 0 167 787 A1) US020160043306A1 (US 2016 / 0 043 306 A1) US020010044220A1 (US 2001 / 0 044 220 A1) US000008482966B2 (US 8 482 966 B2) US020170092847A1 (US 2017 / 0 092 847 A1)
43	Date of first publication	EVT	Dec 20, 2018
	Number of official communications (office actions)		1
	Number of responses		1
	Date of the first transfer into DPMAregister	EREGT	Feb 20, 2020
	Date of the (most recent) update in DPMAregister	REGT	Jun 12, 2025 (Show all update days)(Hide all update days) Jun 12, 2025 Due date: changed Jun 10, 2025 St.36: changed (technical change) Feb 12, 2025 St.36: changed (technical change) Feb 20, 2020 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Pre-registration procedure	The application is under preliminary examination	May 30, 2018		Details anzeigen
2	Procedure relating to PCT application	WO first publication with search report	Dec 20, 2018		Details anzeigen
3	Examination procedure	Request for examination effectively filed	Dec 10, 2019		Details anzeigen
4	Pre-registration procedure	Pre-registration procedure has been concluded	Jan 13, 2020		Details anzeigen
5	Pre-registration procedure	Closing PCT nationale phase entry	Jan 13, 2020		Details anzeigen
6	Publications	Publication of translation of PCT application	Feb 20, 2020	Feb 20, 2020	Details anzeigen
7	Change of classification	Change of IPC main class	Mar 17, 2020	Apr 23, 2020	Details anzeigen
8	Examination procedure	Official communication on examination	Dec 12, 2021		Details anzeigen
9	Examination procedure	Reply to official communication	Apr 28, 2022		Details anzeigen
10	Change of classification	Change of IPC main class	Nov 25, 2022	Jan 5, 2023	Details anzeigen

View procedures Pre-registration procedure (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	The application is under preliminary examination
Date of legal/procedural status	VSTT	May 30, 2018

View procedures Procedure relating to PCT application (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to PCT application
Legal/procedural status	VST	WO first publication with search report
Date of legal/procedural status	VSTT	Dec 20, 2018

View procedures Examination procedure (No.: 3)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Request for examination effectively filed
Date of legal/procedural status	VSTT	Dec 10, 2019
Third party request		No
Date of receipt	AEGT	Dec 10, 2019

View procedures Pre-registration procedure (No.: 4)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Pre-registration procedure has been concluded
Date of legal/procedural status	VSTT	Jan 13, 2020

View procedures Pre-registration procedure (No.: 5)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Closing PCT nationale phase entry
Date of legal/procedural status	VSTT	Jan 13, 2020

View procedures Publications (No.: 6)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Publication of translation of PCT application
	Date of legal/procedural status	VSTT	Feb 20, 2020
	Issue number	HN	8
	Year	PJ	2020
	Publication date	VT	Feb 20, 2020
	Type of publication	PART	Documents
	Part	HT	Part 6
10	Published DE documents	DEPN	Original document: DE112018002981T5 Searchable text: DE112018002981T5

View procedures Change of classification (No.: 7)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Mar 17, 2020
	Issue number	HN	17
	Year	PJ	2020
	Publication date	VT	Apr 23, 2020
	Type of publication	PART	Bibliographic data
	Part	HT	Part 2
51	IPC main class	ICM (ICMV)	H01L 27/22 (2006.01)
51	Previous IPC main class	ICMF (ICMVF)	H01L 43/02 (2006.01)

View procedures Examination procedure (No.: 8)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Official communication on examination
Date of legal/procedural status	VSTT	Dec 12, 2021
Date of update of the procedure	REGT	Dec 14, 2021

View procedures Examination procedure (No.: 9)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Reply to official communication
Date of legal/procedural status	VSTT	Apr 28, 2022
Date of update of the procedure	REGT	Aug 21, 2022

View procedures Change of classification (No.: 10)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Nov 25, 2022
	Issue number	HN	1
	Year	PJ	2023
	Publication date	VT	Jan 5, 2023
	Type of publication	PART	Bibliographic data
	Part	HT	Part 2
51	IPC main class	ICM (ICMV)	H10B 61/00 (2023.01)
51	Previous IPC main class	ICMF (ICMVF)	H01L 27/22 (2006.01)
	Date of update of the procedure	REGT	Jan 5, 2023