Register information Patent

DE file number : 11 2016 001 773.1 (Status: pending/in force, Query started: August 4, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INID	Criterion	Field	Content
	Type of IP right	SART	Patent
	Status	ST	Pending/in force
21	DE file number	DAKZ	11 2016 001 773.1
86	WO file number	WAKZ	PCT/IB2016/053121
87	WO publication number	WPN	2017001953
54	Designation/title	TI	Struktur und Herstellungsverfahren für nicht durch Elektromigration zerstörbare Verbindungen im Nanomaßstab
51	IPC main class	ICM (ICMV)	H01L 23/522 (2006.01)
51	IPC secondary class(es)	ICS (ICSV)	H01L 21/768 (2006.01)
22	DE application date	DAT	May 27, 2016
85	PCT national phase entry patent	PATNAT	Nov 14, 2017
86	WO application date	WAT	May 27, 2016
43	Date of first publication	OT	Jan 5, 2017
	Date of publication of grant	PET	Jun 21, 2018
71/73	Applicant/owner	INH	Tessera, Inc., San Jose, Calif., US
72	Inventor	IN	Briggs, Benjamin, David, Albany, N.Y., US; Rizzolo, Michael, Albany, N.Y., US; Clevenger, Lawrence, Hopewell Junction, N.Y., US; Motoyama, Koichi, Albany, N.Y., US
74	Representative	VTR	Grünecker Patent- und Rechtsanwälte PartG mbB, 80802 München, DE
10	Published DE documents	DEPN	Original document: DE112016001773B4 Searchable text: DE112016001773B4 Original document: DE112016001773T5 Searchable text: DE112016001773T5
	Address for service		Grünecker Patent- und Rechtsanwälte PartG mbB, 80802 München, DE
33 31 32	Foreign priority	PRC PRNA PRDA	US 14/754,999 Jun 30, 2015
	Licence	LIZ	Willingness to grant licences to anyone declared
	Due date	FT FG	May 31, 2026 Annual fee for the 11th year Patent fees
	Patent division in charge		33
87	WO language of publication	WLANG	EN - Englisch
57	Abstract	AB	After forming a trench opening (52) including narrow trench portions (52A) spaced apart by wide trench portions (52B) and forming a stack of a first diffusion barrier layer (62) and a first liner layer (64) on sidewalls and a bottom surface of the trench opening (52), a reflow process is performed to fill the narrow trench portions (52A) but not the wide trench portions (52B) with a first conductive material layer (66). A stack of a second diffusion barrier layer (72) and a second liner layer (74) is formed on portions of the first liner layer (64) and ends of the first conductive material layer (66) exposed by the wide trench portions (52B). A second conductive material layer (76) is deposited to fill the wide trench portions (52B). Portions of the second diffusion barrier layer (72) and the second liner layer (74) located between the first conductive material layer (66) and the second conductive material layer (76) act as vertical blocking boundaries to prevent the electromigration of metal atoms.
81	Designated WO countries	WDS	AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW
	Published EP/WO documents	EPWOPN	Original document: WO2017001953A1 Searchable text: WO2017001953A1
56	Citations	CT	US020140327141A1 (US 2014 / 0 327 141 A1) US020070278681A1 (US 2007 / 0 278 681 A1) US020140048927A1 (US 2014 / 0 048 927 A1)
43	Date of first publication	EVT	Jan 5, 2017
	Number of official communications (office actions)		1
	Number of responses		1
	Date of the first transfer into DPMAregister	EREGT	Dec 28, 2017
	Date of the (most recent) update in DPMAregister	REGT	Jun 12, 2025 (Show all update days)(Hide all update days) Jun 12, 2025 Due date: changed Jun 10, 2025 St.36: changed (technical change) Aug 16, 2024 St.36: changed (technical change) Dec 28, 2017 Date of the first transfer into DPMAregister

Procedural data
No.	Kind of procedure	Legal status	Date of legal/procedural status	Publication date	Alle Details anzeigen
1	Pre-registration procedure	The application is under preliminary examination	May 27, 2016		Details anzeigen
2	Procedure relating to PCT application	WO first publication with search report	Jan 5, 2017		Details anzeigen
3	Examination procedure	Request for examination effectively filed	Nov 14, 2017		Details anzeigen
4	Pre-registration procedure	Pre-registration procedure has been concluded	Nov 17, 2017		Details anzeigen
5	Pre-registration procedure	Closing PCT nationale phase entry	Nov 17, 2017		Details anzeigen
6	Change of classification	Change of IPC main class	Nov 20, 2017		Details anzeigen
7	Publications	Publication of translation of PCT application	Dec 28, 2017	Dec 28, 2017	Details anzeigen
8	Examination procedure	Official communication on examination	Mar 1, 2018		Details anzeigen
9	Examination procedure	Reply to official communication	Mar 7, 2018		Details anzeigen
10	Examination procedure	Decision to grant patent by Examining Section/Patent Division	Mar 8, 2018		Details anzeigen
11	Licence	Willingness to grant licences declared	Apr 6, 2018	May 24, 2018	Details anzeigen
12	Publications	Patent specification	Jun 21, 2018	Jun 21, 2018	Details anzeigen
13	Examination procedure	Grant of patent has become final	Mar 22, 2019	May 29, 2019	Details anzeigen
14	New applicant/owner details	New applicant/owner details	Feb 24, 2020	Apr 2, 2020	Details anzeigen
15	New representative details	New representative details	Feb 24, 2020	Apr 2, 2020	Details anzeigen

View procedures Pre-registration procedure (No.: 1)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	The application is under preliminary examination
Date of legal/procedural status	VSTT	May 27, 2016

View procedures Procedure relating to PCT application (No.: 2)
Criterion	Field	Content Close details
Type of procedure	VART	Procedure relating to PCT application
Legal/procedural status	VST	WO first publication with search report
Date of legal/procedural status	VSTT	Jan 5, 2017

View procedures Examination procedure (No.: 3)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Request for examination effectively filed
Date of legal/procedural status	VSTT	Nov 14, 2017
Third party request		No
Date of receipt	AEGT	Nov 14, 2017

View procedures Pre-registration procedure (No.: 4)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Pre-registration procedure has been concluded
Date of legal/procedural status	VSTT	Nov 17, 2017

View procedures Pre-registration procedure (No.: 5)
Criterion	Field	Content Close details
Type of procedure	VART	Pre-registration procedure
Legal/procedural status	VST	Closing PCT nationale phase entry
Date of legal/procedural status	VSTT	Nov 17, 2017

View procedures Change of classification (No.: 6)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Change of classification
	Legal/procedural status	VST	Change of IPC main class
	Date of legal/procedural status	VSTT	Nov 20, 2017
51	IPC main class	ICM (ICMV)	H01L 23/522 (2006.01)
51	Previous IPC main class	ICMF (ICMVF)	H01L 23/48 (2006.01)

View procedures Publications (No.: 7)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Publication of translation of PCT application
	Date of legal/procedural status	VSTT	Dec 28, 2017
	Issue number	HN	52
	Year	PJ	2017
	Publication date	VT	Dec 28, 2017
	Type of publication	PART	Documents
	Part	HT	Part 6
10	Published DE documents	DEPN	Original document: DE112016001773T5 Searchable text: DE112016001773T5

View procedures Examination procedure (No.: 8)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Official communication on examination
Date of legal/procedural status	VSTT	Mar 1, 2018

View procedures Examination procedure (No.: 9)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Reply to official communication
Date of legal/procedural status	VSTT	Mar 7, 2018

View procedures Examination procedure (No.: 10)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Decision to grant patent by Examining Section/Patent Division
Date of legal/procedural status	VSTT	Mar 8, 2018

View procedures Licence (No.: 11)
Criterion	Field	Content Close details
Type of procedure	VART	Licence
Legal/procedural status	VST	Willingness to grant licences declared
Date of legal/procedural status	VSTT	Apr 6, 2018
Issue number	HN	21
Year	PJ	2018
Publication date	VT	May 24, 2018
Type of publication	PART	Bibliographic data
Part	HT	Part 3
Date of update of the procedure	REGT	Feb 9, 2023

View procedures Publications (No.: 12)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	Publications
	Legal/procedural status	VST	Patent specification
	Date of legal/procedural status	VSTT	Jun 21, 2018
	Issue number	HN	25
	Year	PJ	2018
	Publication date	VT	Jun 21, 2018
	Type of publication	PART	Documents
	Part	HT	Part 3
10	Published DE documents	DEPN	Original document: DE112016001773B4 Searchable text: DE112016001773B4

View procedures Examination procedure (No.: 13)
Criterion	Field	Content Close details
Type of procedure	VART	Examination procedure
Legal/procedural status	VST	Grant of patent has become final
Date of legal/procedural status	VSTT	Mar 22, 2019
Issue number	HN	22
Year	PJ	2019
Publication date	VT	May 29, 2019
Type of publication	PART	Bibliographic data
Part	HT	Part 3

View procedures New applicant/owner details (No.: 14)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New applicant/owner details
	Legal/procedural status	VST	New applicant/owner details
	Date of legal/procedural status	VSTT	Feb 24, 2020
	Issue number	HN	14
	Year	PJ	2020
	Publication date	VT	Apr 2, 2020
	Type of publication	PART	Bibliographic data
	Part	HT	Part 3
71/73	Applicant/owner	INH	Tessera, Inc., San Jose, Calif., US
71/73	Previous applicant/owner	INHF	International Business Machines Corporation, Armonk, NY, US
	Date of update of the procedure	REGT	Apr 13, 2021

View procedures New representative details (No.: 15)
INID	Criterion	Field	Content Close details
	Type of procedure	VART	New representative details
	Legal/procedural status	VST	New representative details
	Date of legal/procedural status	VSTT	Feb 24, 2020
	Issue number	HN	14
	Year	PJ	2020
	Publication date	VT	Apr 2, 2020
	Type of publication	PART	Bibliographic data
	Part	HT	Part 3
74	Representative	VTR	Grünecker Patent- und Rechtsanwälte PartG mbB, 80802 München, DE
74	Previous representative	VTRF	Richardt Patentanwälte PartG mbB, 65185 Wiesbaden, DE