Register information Patent

DE file number : 10 2023 109 852.7 (Status: pending/in force, Query started: August 9, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2023 109 852.7
54Designation/titleTIPELLIKEL FÜR EUV-LITHOGRAFIEMASKEN UND VERFAHREN ZU DEREN HERSTELLUNG
51IPC main classICM
(ICMV)		 G03F 1/62 (2012.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 7/20 (2006.01), C01B 32/158 (2017.01)
22DE application dateDATApr 19, 2023
43Date of first publicationOTMar 21, 2024
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW
72InventorINHsu, Pei-Cheng, Hsinchu, TW; Lee, Wei-Hao, Hsinchu, TW; Lee, Huan-Ling, Hsinchu, TW; Lee, Hsin-Chang, Hsinchu, TW; Lin, Chin-Hsiang, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102023109852A1
Searchable text: DE102023109852A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
63/408,502
Sep 21, 2022
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
18/133,945
Apr 12, 2023
Due dateFT
FG		Apr 30, 2026
Annual fee for the 4th year Patent fees
Patent division in charge 51
43Date of first publicationEVTMar 21, 2024
Number of official communications (office actions) 0
Number of responses 0
Date of the first transfer into DPMAregisterEREGTMar 21, 2024
Date of the (most recent) update in DPMAregisterREGTMay 9, 2025
(Show all update days)(Hide all update days)
  • May 9, 2025
    • Due date: changed
  • Apr 23, 2025
    • St.36: changed (technical change)
  • Jul 24, 2024
    • St.36: changed (technical change)
  • Mar 21, 2024
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Apr 19, 2023  Details anzeigen
2 Examination procedure Request for examination effectively filed Apr 19, 2023  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Sep 3, 2023  Details anzeigen
4 Publications Publication of application (Offenlegungsschrift) Mar 21, 2024 Mar 21, 2024 Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTApr 19, 2023
Date of update of the procedureREGTMar 21, 2024
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTApr 19, 2023
Third party request No
Date of receiptAEGTApr 19, 2023
Date of update of the procedureREGTMar 21, 2024
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTSep 3, 2023
Date of update of the procedureREGTMar 21, 2024
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTMar 21, 2024
Issue numberHN12
YearPJ2024
Publication dateVTMar 21, 2024
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102023109852A1
Searchable text: DE102023109852A1
Date of update of the procedureREGTMar 21, 2024