Register information Patent

DE file number : 10 2022 122 394.9 (Status: pending/in force, Query started: September 25, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2022 122 394.9
54Designation/titleTISYSTEM UND VERFAHREN FÜR PLASMAUNTERSTÜTZTE ATOMLAGENABSCHEIDUNG MIT SCHUTZGITTER
51IPC main classICM
(ICMV)		 H01J 37/30 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01J 37/317 (2006.01), H01J 37/305 (2006.01), H01J 37/02 (2006.01), H01J 37/16 (2006.01), H01J 37/20 (2006.01), H05H 1/24 (2006.01)
22DE application dateDATSep 5, 2022
43Date of first publicationOTApr 27, 2023
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72InventorINLee, Wei-Hao, Hsinchu, TW; Hsu, Pei-Cheng, Hsinchu, TW; Lee, Hsin-Chang, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102022122394A1
Searchable text: DE102022122394A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
17/750,145
May 20, 2022
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
63/271,542
Oct 25, 2021
Due dateFT
FG		Sep 30, 2025
Annual fee for the 4th year Patent fees
Patent division in charge 54
43Date of first publicationEVTApr 27, 2023
Number of official communications (office actions) 0
Number of responses 0
Date of the first transfer into DPMAregisterEREGTApr 27, 2023
Date of the (most recent) update in DPMAregisterREGTOct 8, 2024
(Show all update days)(Hide all update days)
  • Oct 8, 2024
    • Due date: changed
  • Aug 16, 2024
    • St.36: changed (technical change)
  • May 23, 2024; Dec 19, 2023; Dec 14, 2023
    • Historical data not available for this/these date(s)
  • Apr 27, 2023
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Sep 5, 2022  Details anzeigen
2 Examination procedure Request for examination effectively filed Sep 5, 2022  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Nov 3, 2022  Details anzeigen
4 Publications Publication of application (Offenlegungsschrift) Apr 27, 2023 Apr 27, 2023 Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTSep 5, 2022
Date of update of the procedureREGTApr 27, 2023
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTSep 5, 2022
Third party request No
Date of receiptAEGTSep 5, 2022
Date of update of the procedureREGTApr 27, 2023
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTNov 3, 2022
Date of update of the procedureREGTApr 27, 2023
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTApr 27, 2023
Issue numberHN17
YearPJ2023
Publication dateVTApr 27, 2023
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102022122394A1
Searchable text: DE102022122394A1
Date of update of the procedureREGTApr 27, 2023