Register information Patent

DE file number : 10 2022 109 612.2 (Status: pending/in force, Query started: August 9, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2022 109 612.2
54Designation/titleTILITHOGRAPHISCHE MASKE UND VERFAHREN
51IPC main classICM
(ICMV)		 G03F 1/26 (2012.01)
51IPC secondary class(es)ICS
(ICSV)		 G03F 1/80 (2012.01)
22DE application dateDATApr 21, 2022
43Date of first publicationOTDec 8, 2022
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72InventorINChen, Chien-Cheng, Hsinchu, TW; Lee, Huan-Ling, Hsinchu, TW; Lien, Ta-Cheng, Hsinchu, TW; Chen, Chia-Jen, Hsinchu, TW; Lee, Hsin-Chang, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102022109612A1
Searchable text: DE102022109612A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
63/197,651
Jun 7, 2021
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
17/716,849
Apr 8, 2022
Due dateFT
FG		Apr 30, 2026
Annual fee for the 5th year Patent fees
Patent division in charge 51
56CitationsCT[X]    DE102015104473A1 (DE 10 2015 104 473 A1)
[X]    US020180259841A1 (US 2018 / 0 259 841 A1)
43Date of first publicationEVTDec 8, 2022
Number of official communications (office actions) 1
Number of responses 1
Date of the first transfer into DPMAregisterEREGTDec 9, 2022
Date of the (most recent) update in DPMAregisterREGTMay 9, 2025
(Show all update days)(Hide all update days)
  • May 9, 2025
    • Due date: changed
  • May 6, 2025
    • St.36: changed (technical change)
  • Mar 6, 2025
    • Number of responses: changed
    • Procedures: Examination procedure, Reply to official communication received, 27.02.2025: new
  • Oct 30, 2024
    • Citations: new
    • Number of official communications (office actions): changed
    • Procedures: Examination procedure, Official communication on examination issued, 29.10.2024: new
  • Aug 16, 2024
    • St.36: changed (technical change)
  • Dec 9, 2022
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Apr 21, 2022  Details anzeigen
2 Examination procedure Request for examination effectively filed Apr 21, 2022  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Jun 22, 2022  Details anzeigen
4 Publications Publication of application (Offenlegungsschrift) Dec 8, 2022 Dec 8, 2022 Details anzeigen
5 Examination procedure Official communication on examination Oct 29, 2024  Details anzeigen
6 Examination procedure Reply to official communication Feb 27, 2025  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTApr 21, 2022
Date of update of the procedureREGTDec 9, 2022
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTApr 21, 2022
Third party request No
Date of receiptAEGTApr 21, 2022
Date of update of the procedureREGTDec 9, 2022
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTJun 22, 2022
Date of update of the procedureREGTDec 9, 2022
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTDec 8, 2022
Issue numberHN49
YearPJ2022
Publication dateVTDec 8, 2022
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102022109612A1
Searchable text: DE102022109612A1
Date of update of the procedureREGTDec 9, 2022
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTOct 29, 2024
Date of update of the procedureREGTOct 30, 2024
View procedures Examination procedure (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTFeb 27, 2025
Date of update of the procedureREGTMar 6, 2025