Register information Patent

DE file number : 10 2022 108 249.0 (Status: pending/in force, Query started: August 9, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2022 108 249.0
54Designation/titleTIVerfahren zur Herstellung eines Pellikels für eine reflektierende EUV-Maske und reflektierende EUV-Maske
51IPC main classICM
(ICMV)		 G03F 1/62 (2012.01)
51IPC secondary class(es)ICS
(ICSV)		 H01L 21/027 (2006.01), B82Y 30/00 (2011.01), B82Y 40/00 (2011.01), G03F 1/64 (2012.01), G03F 1/24 (2012.01)
22DE application dateDATApr 6, 2022
43Date of first publicationOTJun 29, 2023
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72InventorINChao, Tzu-Ang, Hsinchu, TW; Li, Ming-Yang, Hsinchu, TW; Cheng, Chao-Ching, Hsinchu, TW; Wang, Han, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102022108249A1
Searchable text: DE102022108249A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
17/710,545
Mar 31, 2022
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
63/294,719
Dec 29, 2021
Due dateFT
FG		Apr 30, 2026
Annual fee for the 5th year Patent fees
Patent division in charge 51
62Free division/divided out on the grounds of lack of unity in file numberTIAKZ10 2022 005 237.7
10 2022 005 240.7
56CitationsCT[X]    EP000003264174A1 (EP 3 264 174 A1)
[X]    US020200272047A1 (US 2020 / 0 272 047 A1)
[X]    US020180329289A1 (US 2018 / 0 329 289 A1)
43Date of first publicationEVTJun 29, 2023
Number of official communications (office actions) 2
Number of responses 2
Date of the first transfer into DPMAregisterEREGTJun 29, 2023
Date of the (most recent) update in DPMAregisterREGTJul 26, 2025
(Show all update days)(Hide all update days)
  • Jul 26, 2025
    • Free division/divided out on the grounds of lack of unity in file number: changed
    • Procedures: Administrative procedure, Divisional application new file, 07.07.2025: new
  • Jul 18, 2025
    • Free division/divided out on the grounds of lack of unity in file number: new
    • Procedures: Administrative procedure, Divisional application new file, 07.07.2025: new
  • Jul 1, 2025
    • IPC secondary class(es): changed
    • Procedures: Examination procedure, Decision to grant patent , 30.06.2025: new
  • Jun 27, 2025
    • Designation/title: changed
  • Jun 24, 2025
    • Number of responses: changed
    • Procedures: Examination procedure, Reply to official communication received, 05.06.2025: new
  • May 9, 2025
    • Due date: changed
  • May 6, 2025
    • St.36: changed (technical change)
  • Apr 9, 2025
    • Citations: changed
    • Number of official communications (office actions): changed
    • Procedures: Examination procedure, Official communication on examination issued, 08.04.2025: new
  • Aug 16, 2024
    • St.36: changed (technical change)
  • Jun 29, 2023
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Apr 6, 2022  Details anzeigen
2 Examination procedure Request for examination effectively filed Apr 6, 2022  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Jul 5, 2022  Details anzeigen
4 Examination procedure Official communication on examination Aug 5, 2022  Details anzeigen
5 Publications Publication of application (Offenlegungsschrift) Jun 29, 2023 Jun 29, 2023 Details anzeigen
6 Examination procedure Reply to official communication Aug 4, 2023  Details anzeigen
7 Examination procedure Official communication on examination Apr 8, 2025  Details anzeigen
8 Examination procedure Reply to official communication Jun 5, 2025  Details anzeigen
9 Examination procedure Decision to grant patent by Examining Section/Patent Division Jun 30, 2025  Details anzeigen
10 Administrative procedure Divisional application (free division or divided out on the grounds of lack of unity) new file Jul 7, 2025  Details anzeigen
11 Administrative procedure Divisional application (free division or divided out on the grounds of lack of unity) new file Jul 7, 2025  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTApr 6, 2022
Date of update of the procedureREGTJun 29, 2023
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTApr 6, 2022
Third party request No
Date of receiptAEGTApr 6, 2022
Date of update of the procedureREGTJun 29, 2023
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTJul 5, 2022
Date of update of the procedureREGTJun 29, 2023
View procedures Examination procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTAug 5, 2022
Date of update of the procedureREGTJun 29, 2023
View procedures Publications (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTJun 29, 2023
Issue numberHN26
YearPJ2023
Publication dateVTJun 29, 2023
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102022108249A1
Searchable text: DE102022108249A1
Date of update of the procedureREGTJun 29, 2023
View procedures Examination procedure (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTAug 4, 2023
Date of update of the procedureREGTAug 8, 2023
View procedures Examination procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTApr 8, 2025
Date of update of the procedureREGTApr 9, 2025
View procedures Examination procedure (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTJun 5, 2025
Date of update of the procedureREGTJun 24, 2025
View procedures Examination procedure (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTDecision to grant patent by Examining Section/Patent Division
Date of legal/procedural statusVSTTJun 30, 2025
Date of update of the procedureREGTJul 1, 2025
View procedures Administrative procedure (No.: 10)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTDivisional application (free division or divided out on the grounds of lack of unity) new file
Date of legal/procedural statusVSTTJul 7, 2025
Date of update of the procedureREGTJul 18, 2025
View procedures Administrative procedure (No.: 11)
INIDCriterionFieldContent Close details
Type of procedureVARTAdministrative procedure
Legal/procedural statusVSTDivisional application (free division or divided out on the grounds of lack of unity) new file
Date of legal/procedural statusVSTTJul 7, 2025
Date of update of the procedureREGTJul 26, 2025