Register information Patent

DE file number : 10 2021 116 987.9 (Status: pending/in force, Query started: August 22, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2021 116 987.9
54Designation/titleTIHALBLEITERVORRICHTUNG UND HERSTELLUNGSVERFAHREN DAFÜR
51IPC main classICM
(ICMV)		 H10D 30/60 (2025.01)
51IPC secondary class(es)ICS
(ICSV)		 H01L 21/318 (2006.01), H10D 30/01 (2025.01)
22DE application dateDATJul 1, 2021
43Date of first publicationOTSep 8, 2022
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72InventorINHung, Yi-Tse, Hsinchu, TW; Chou, Ang-Sheng, Hsinchu, TW; Chiang, Hung-Li, Hsinchu, TW; Chen, Tzu-Chiang, Hsinchu, TW; Cheng, Chao-Ching, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102021116987A1
Searchable text: DE102021116987A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
63/156,932
Mar 5, 2021
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
17/351,244
Jun 18, 2021
Due dateFT
FG		Jul 31, 2026
Annual fee for the 6th year Patent fees
Patent division in charge 33
56CitationsCT[X, Y]    US020200335614A1 (US 2020 / 0 335 614 A1)
56NPL citationsCTNPLIU, Donghua, [et al.]: Conformal hexagonal-boron nitride dielectric interface for tungsten diselenide devices with improved mobility and thermal dissipation. In: Nature communications, 10, 2019, 1, 1188.;
LEE, Yao-Jen, [et al.]: Ge GAA FETs and TMD finfets for the applications beyond Si - A review. In: IEEE Journal of the Electron Devices Society, 4, 2016, 5, 286-293.
43Date of first publicationEVTSep 8, 2022
Number of official communications (office actions) 2
Number of responses 2
Date of the first transfer into DPMAregisterEREGTSep 8, 2022
Date of the (most recent) update in DPMAregisterREGTAug 12, 2025
(Show all update days)(Hide all update days)
  • Aug 12, 2025
    • Due date: changed
  • Jun 13, 2025
    • Number of responses: changed
    • Procedures: Examination procedure, Reply to official communication received, 11.06.2025: new
  • Apr 23, 2025
    • St.36: changed (technical change)
  • Jan 2, 2025
    • IPC main class: changed
    • IPC secondary class(es): changed
    • Procedures: Change of classification, Change of IPC main class, 22.11.2024: new
  • Aug 9, 2024
    • Due date: changed
  • Aug 6, 2024
    • St.36: changed (technical change)
  • Sep 8, 2022
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Jul 1, 2021  Details anzeigen
2 Examination procedure Request for examination effectively filed Jul 1, 2021  Details anzeigen
3 Examination procedure Official communication on examination Jul 9, 2021  Details anzeigen
4 Pre-registration procedure Pre-registration procedure has been concluded Jul 29, 2021  Details anzeigen
5 Examination procedure Reply to official communication Aug 3, 2021  Details anzeigen
6 Publications Publication of application (Offenlegungsschrift) Sep 8, 2022 Sep 8, 2022 Details anzeigen
7 Examination procedure Official communication on examination Aug 17, 2023  Details anzeigen
8 Change of classification Change of IPC main class Nov 22, 2024 Jan 2, 2025 Details anzeigen
9 Examination procedure Reply to official communication Jun 11, 2025  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTJul 1, 2021
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTJul 1, 2021
Third party request No
Date of receiptAEGTJul 1, 2021
View procedures Examination procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTJul 9, 2021
View procedures Pre-registration procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTJul 29, 2021
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTAug 3, 2021
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTSep 8, 2022
Issue numberHN36
YearPJ2022
Publication dateVTSep 8, 2022
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102021116987A1
Searchable text: DE102021116987A1
View procedures Examination procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTAug 17, 2023
Date of update of the procedureREGTAug 18, 2023
View procedures Change of classification (No.: 8)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTNov 22, 2024
Issue numberHN1
YearPJ2025
Publication dateVTJan 2, 2025
Type of publicationPARTBibliographic data
PartHTPart 2
51IPC main classICM
(ICMV)		 H10D 30/60 (2025.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 29/78 (2006.01)
Date of update of the procedureREGTJan 2, 2025
View procedures Examination procedure (No.: 9)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTJun 11, 2025
Date of update of the procedureREGTJun 13, 2025