Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 10 2021 111 318.0 |
54 | Designation/title | TI | 3D-SPEICHERARRAY-KONTAKTSTRUKTUREN |
51 | IPC main class | ICM (ICMV) | H10B 51/20 (2023.01) |
51 | IPC secondary class(es) | ICS (ICSV) | H10B 43/20 (2023.01) |
22 | DE application date | DAT | May 3, 2021 |
43 | Date of first publication | OT | Dec 30, 2021 |
71/73 | Applicant/owner | INH | Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW |
72 | Inventor | IN | Lin, Meng-Han, Hsinchu, TW; Yang, Feng-Cheng, Hsinchu, TW; Wang, Sheng-Chen, Hsinchu, TW; Yeong, Sai-Hooi, Hsinchu, TW; Lin, Yu-Ming, Hsinchu, TW; Chia, Han-Jong, Hsinchu, TW |
74 | Representative | VTR | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
10 | Published DE documents | DEPN | Original document:
DE102021111318A1 Searchable text:
DE102021111318A1 |
| Address for service | | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 17/231,523 Apr 15, 2021
|
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 63/044,092 Jun 25, 2020
|
| Due date | FT FG | May 31, 2026 Annual fee for the 6th year
Patent fees |
| Patent division in charge | | 33 |
56 | Citations | CT | [X]
US020200185411A1 (US 2020 / 0 185 411 A1) [Y]
US020140264718A1 (US 2014 / 0 264 718 A1)
|
56 | NPL citations | CTNP | Karouta, F.: A practical approach to reactive ion etching. In: Journal of Physics D: Applied Physics, 47, 2014, 233501. |
43 | Date of first publication | EVT | Dec 30, 2021 |
| Number of official communications (office actions) | | 1 |
| Number of responses | | 1 |
| Date of the first transfer into DPMAregister | EREGT | Dec 30, 2021 |
| Date of the (most recent) update in DPMAregister | REGT | Jun 12, 2025 (Show all update days)(Hide all update days)- Jun 12, 2025
- Jun 10, 2025
- St.36: changed (technical change)
- Feb 21, 2025
- Aug 16, 2024
- St.36: changed (technical change)
- Dec 30, 2021
- Date of the first transfer into DPMAregister
|