Register information Patent

DE file number : 10 2021 110 173.5 (Status: pending/in force, Query started: August 9, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2021 110 173.5
54Designation/titleTIIN-SITU-ABSCHEIDUNG UND VERDICHTUNGSBEHANDLUNG FÜR METALHALTIGE RESISTSCHICHT
51IPC main classICM
(ICMV)		 H01L 21/316 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01L 21/3105 (2006.01)
22DE application dateDATApr 22, 2021
43Date of first publicationOTMar 31, 2022
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72InventorINKuo, Yi-Chen, Hsinchu, TW; Liu, Chih-Cheng, Hsinchu, TW; Chen, Yen-Yu, Hsinchu, TW; Li, Jr-Hung, Hsinchu, TW; Yang, Chi-Ming, Hsinchu, TW; Lee, Tze-Liang, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102021110173A1
Searchable text: DE102021110173A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
63/085,610
Sep 30, 2020
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
17/231,702
Apr 15, 2021
Due dateFT
FG		Apr 30, 2026
Annual fee for the 6th year Patent fees
Patent division in charge 33
56CitationsCT[Y]    US020200135451A1 (US 2020 / 0 135 451 A1)
[Y]    US020170146909A1 (US 2017 / 0 146 909 A1)
[Y]    US020180348636A1 (US 2018 / 0 348 636 A1)
[X]    WO002019217749A1 (WO 2019/ 217 749 A1)
43Date of first publicationEVTMar 31, 2022
Number of official communications (office actions) 1
Number of responses 1
Date of the first transfer into DPMAregisterEREGTMar 31, 2022
Date of the (most recent) update in DPMAregisterREGTMay 9, 2025
(Show all update days)(Hide all update days)
  • May 9, 2025
    • Due date: changed
  • May 7, 2025
    • St.36: changed (technical change)
  • Aug 16, 2024
    • St.36: changed (technical change)
  • Mar 31, 2022
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Apr 22, 2021  Details anzeigen
2 Examination procedure Request for examination effectively filed Apr 22, 2021  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Dec 2, 2021  Details anzeigen
4 Publications Publication of application (Offenlegungsschrift) Mar 31, 2022 Mar 31, 2022 Details anzeigen
5 Examination procedure Official communication on examination Aug 18, 2022  Details anzeigen
6 Examination procedure Reply to official communication Nov 23, 2023  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTApr 22, 2021
Date of update of the procedureREGTMar 31, 2022
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTApr 22, 2021
Third party request No
Date of receiptAEGTApr 22, 2021
Date of update of the procedureREGTMar 31, 2022
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTDec 2, 2021
Date of update of the procedureREGTMar 31, 2022
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTMar 31, 2022
Issue numberHN13
YearPJ2022
Publication dateVTMar 31, 2022
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102021110173A1
Searchable text: DE102021110173A1
Date of update of the procedureREGTMar 31, 2022
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTAug 18, 2022
Date of update of the procedureREGTAug 19, 2022
View procedures Examination procedure (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTNov 23, 2023
Date of update of the procedureREGTNov 25, 2023