Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 10 2021 109 278.7 |
54 | Designation/title | TI | ÄTZPROFILSTEUERUNG EINER DURCHKONTAKTIERUNGSÖFFNUNG |
51 | IPC main class | ICM (ICMV) | H01L 21/768 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | H01L 23/522 (2006.01), H10D 30/01 (2025.01), H10D 30/60 (2025.01), H10D 84/83 (2025.01) |
22 | DE application date | DAT | Apr 14, 2021 |
43 | Date of first publication | OT | Mar 31, 2022 |
71/73 | Applicant/owner | INH | Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW |
72 | Inventor | IN | Hsiung, Te-Chih, Hsinchu, TW; Wu, Jyun-De, Hsinchu, TW; Wang, Peng, Hsinchu, TW; Lin, Huan-Just, Hsinchu, TW |
74 | Representative | VTR | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
10 | Published DE documents | DEPN | Original document:
DE102021109278A1 Searchable text:
DE102021109278A1 |
| Address for service | | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 63/084,992 Sep 29, 2020
|
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 17/225,798 Apr 8, 2021
|
| Due date | FT FG | Apr 30, 2026 Annual fee for the 6th year
Patent fees |
| Patent division in charge | | 33 |
56 | Citations | CT |
US020190333915A1 (US 2019 / 0 333 915 A1)
US020170288031A1 (US 2017 / 0 288 031 A1)
|
43 | Date of first publication | EVT | Mar 31, 2022 |
| Number of official communications (office actions) | | 2 |
| Number of responses | | 2 |
| Date of the first transfer into DPMAregister | EREGT | Mar 31, 2022 |
| Date of the (most recent) update in DPMAregister | REGT | Jun 5, 2025 (Show all update days)(Hide all update days)- Jun 5, 2025
- Procedures: Examination procedure, Decision to grant patent , 04.06.2025: new
- May 9, 2025
- May 7, 2025
- St.36: changed (technical change)
- Feb 12, 2025
- IPC secondary class(es): changed
- Aug 20, 2024
- Number of responses: changed
- Procedures: Examination procedure, Reply to official communication received, 14.08.2024: new
- Aug 17, 2024
- St.36: changed (technical change)
- Mar 31, 2022
- Date of the first transfer into DPMAregister
|