Register information Patent

DE file number : 10 2021 108 697.3 (Status: pending/in force, Query started: August 9, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2021 108 697.3
54Designation/titleTITRANSISTOR-GATESTRUKTUREN UND VERFAHREN ZU DEREN HERSTELLUNG
51IPC main classICM
(ICMV)		 H10D 84/85 (2025.01)
51IPC secondary class(es)ICS
(ICSV)		 H10D 64/66 (2025.01)
22DE application dateDATApr 8, 2021
43Date of first publicationOTJul 28, 2022
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72InventorINLee, Hsin-Yi, Hsinchu, TW; Chang, Weng, Hsinchu, TW; Chui, Chi On, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102021108697A1
Searchable text: DE102021108697A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
17/220,076
Apr 1, 2021
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
63/142,549
Jan 28, 2021
Due dateFT
FG		Apr 30, 2026
Annual fee for the 6th year Patent fees
Patent division in charge 33
56CitationsCT DE102020100795A1 (DE 10 2020 100 795 A1)
US020200328213A1 (US 2020 / 0 328 213 A1)
DE102019107531A1 (DE 10 2019 107 531 A1)
US020200312844A1 (US 2020 / 0 312 844 A1)
US020190198498A1 (US 2019 / 0 198 498 A1)
US020200176581A1 (US 2020 / 0 176 581 A1)
56NPL citationsCTNPKIM, Hyunjung [et al.]: The annealing effect on work function variation of WNxCy films deposited by remote plasma atomic layer deposition. In: Physica status solidi (a), Vol. 214., 2017, No. 7, Art.-No. 1700010, 5 S. ISSN 1862-6300. https://onlinelibrary.wiley.com/doi/pdfdirect/10.1002/pssa.201700010?download=true [abgerufen am 04.07.2025]
43Date of first publicationEVTJul 28, 2022
Number of official communications (office actions) 1
Number of responses 1
Date of the first transfer into DPMAregisterEREGTJul 28, 2022
Date of the (most recent) update in DPMAregisterREGTJul 19, 2025
(Show all update days)(Hide all update days)
  • Jul 19, 2025
    • Citations: changed
  • Jul 11, 2025
    • Citations: changed
    • NPL citations: new
  • May 9, 2025
    • Due date: changed
  • May 7, 2025
    • St.36: changed (technical change)
  • Jan 2, 2025
    • IPC main class: changed
    • IPC secondary class(es): changed
    • Procedures: Change of classification, Change of IPC main class, 22.11.2024: new
  • Aug 16, 2024
    • St.36: changed (technical change)
  • Jul 28, 2022
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Apr 8, 2021  Details anzeigen
2 Examination procedure Request for examination effectively filed Apr 8, 2021  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded May 4, 2021  Details anzeigen
4 Examination procedure Official communication on examination Sep 16, 2021  Details anzeigen
5 Examination procedure Reply to official communication Apr 26, 2022  Details anzeigen
6 Publications Publication of application (Offenlegungsschrift) Jul 28, 2022 Jul 28, 2022 Details anzeigen
7 Change of classification Change of IPC main class Nov 22, 2024 Jan 2, 2025 Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTApr 8, 2021
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTApr 8, 2021
Third party request No
Date of receiptAEGTApr 8, 2021
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTMay 4, 2021
View procedures Examination procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTSep 16, 2021
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTApr 26, 2022
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTJul 28, 2022
Issue numberHN30
YearPJ2022
Publication dateVTJul 28, 2022
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102021108697A1
Searchable text: DE102021108697A1
View procedures Change of classification (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTNov 22, 2024
Issue numberHN1
YearPJ2025
Publication dateVTJan 2, 2025
Type of publicationPARTBibliographic data
PartHTPart 2
51IPC main classICM
(ICMV)		 H10D 84/85 (2025.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 27/092 (2006.01)
Date of update of the procedureREGTJan 2, 2025