Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 10 2021 108 491.1 |
54 | Designation/title | TI | INTERCONNECT-STRUKTUR MIT STAPEL AUS DIELEKTRISCHER KAPPSCHICHT UND ÄTZSTOPPSCHICHT UND VERFAHREN |
51 | IPC main class | ICM (ICMV) | H01L 21/768 (2006.01) |
51 | IPC secondary class(es) | ICS (ICSV) | H01L 23/52 (2006.01) |
22 | DE application date | DAT | Apr 6, 2021 |
43 | Date of first publication | OT | Mar 31, 2022 |
| Date of publication of grant | PET | Feb 13, 2025 |
71/73 | Applicant/owner | INH | Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW |
72 | Inventor | IN | Wang, Chao-Chun, Hsinchu, TW; Wang, Jen Hung, Hsinchu, TW |
74 | Representative | VTR | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
10 | Published DE documents | DEPN | Original document:
DE102021108491A1 Searchable text:
DE102021108491A1 Original document:
DE102021108491B4 Searchable text:
DE102021108491B4 |
| Address for service | | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 17/210,015 Mar 23, 2021
|
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 63/084,812 Sep 29, 2020
|
| Due date | FT FG | Apr 30, 2026 Annual fee for the 6th year
Patent fees |
| Patent division in charge | | 33 |
56 | Citations | CT |
US020130277853A1 (US 2013 / 0 277 853 A1)
US020170278742A1 (US 2017 / 0 278 742 A1)
|
43 | Date of first publication | EVT | Mar 31, 2022 |
| Number of official communications (office actions) | | 1 |
| Number of responses | | 1 |
| Date of the first transfer into DPMAregister | EREGT | Mar 31, 2022 |
| Date of the (most recent) update in DPMAregister | REGT | May 9, 2025 (Show all update days)(Hide all update days)- May 9, 2025
- May 7, 2025
- St.36: changed (technical change)
- Feb 13, 2025
- Published DE documents: changed
- Procedures: Publications, Patent specification, 13.02.2025: changed
- Jan 17, 2025
- Procedures: Publications, Patent specification, 13.02.2025: new
- Jan 10, 2025
- Date of publication of grant: new
- Nov 9, 2024
- Procedures: Examination procedure, Decision to grant patent , 08.11.2024: new
- Nov 7, 2024
- Designation/title: changed
- Aug 16, 2024
- St.36: changed (technical change)
- Mar 31, 2022
- Date of the first transfer into DPMAregister
|