Register information Patent

DE file number : 10 2020 125 324.9 (Status: pending/in force, Query started: October 23, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2020 125 324.9
54Designation/titleTITeilweise gerichtetes Ätzverfahren und die daraus resultierenden Strukturen
51IPC main classICM
(ICMV)		 H10D 64/01 (2025.01)
51IPC secondary class(es)ICS
(ICSV)		 H10D 30/60 (2025.01), H10D 30/01 (2025.01), H10D 64/27 (2025.01)
22DE application dateDATSep 29, 2020
43Date of first publicationOTAug 26, 2021
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72InventorINWang, Shiang-Bau, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102020125324A1
Searchable text: DE102020125324A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
62/981,838
Feb 26, 2020
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
17/026,012
Sep 18, 2020
Due dateFT
FG		Sep 30, 2026
Annual fee for the 7th year Patent fees
Patent division in charge 33
56CitationsCT DE102020107241A1 (DE 10 2020 107 241 A1)
DE102019128469A1 (DE 10 2019 128 469 A1)
43Date of first publicationEVTAug 26, 2021
Number of official communications (office actions) 1
Number of responses 1
Date of the first transfer into DPMAregisterEREGTAug 26, 2021
Date of the (most recent) update in DPMAregisterREGTOct 8, 2025
(Show all update days)(Hide all update days)
  • Oct 8, 2025
    • Due date: changed
  • Oct 7, 2025
    • St.36: changed (technical change)
  • Jan 2, 2025
    • IPC main class: changed
    • IPC secondary class(es): changed
    • Procedures: Change of classification, Change of IPC main class, 22.11.2024: new
  • Oct 11, 2024
    • Number of responses: changed
    • Procedures: Examination procedure, Reply to official communication received, 10.10.2024: new
  • Oct 8, 2024
    • Due date: changed
  • Aug 19, 2024
    • St.36: changed (technical change)
  • May 23, 2024; Dec 14, 2023; Oct 7, 2023; Oct 6, 2023; Oct 13, 2022
    • Historical data not available for this/these date(s)
  • Aug 26, 2021
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Sep 29, 2020  Details anzeigen
2 Examination procedure Request for examination effectively filed Sep 29, 2020  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Jan 7, 2021  Details anzeigen
4 Publications Publication of application (Offenlegungsschrift) Aug 26, 2021 Aug 26, 2021 Details anzeigen
5 Examination procedure Official communication on examination Oct 6, 2023  Details anzeigen
6 Examination procedure Reply to official communication Oct 10, 2024  Details anzeigen
7 Change of classification Change of IPC main class Nov 22, 2024 Jan 2, 2025 Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTSep 29, 2020
Date of update of the procedureREGTAug 26, 2021
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTSep 29, 2020
Third party request No
Date of receiptAEGTSep 29, 2020
Date of update of the procedureREGTAug 26, 2021
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTJan 7, 2021
Date of update of the procedureREGTAug 26, 2021
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTAug 26, 2021
Issue numberHN34
YearPJ2021
Publication dateVTAug 26, 2021
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102020125324A1
Searchable text: DE102020125324A1
Date of update of the procedureREGTAug 26, 2021
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTOct 6, 2023
Date of update of the procedureREGTOct 7, 2023
View procedures Examination procedure (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTOct 10, 2024
Date of update of the procedureREGTOct 11, 2024
View procedures Change of classification (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTChange of classification
Legal/procedural statusVSTChange of IPC main class
Date of legal/procedural statusVSTTNov 22, 2024
Issue numberHN1
YearPJ2025
Publication dateVTJan 2, 2025
Type of publicationPARTBibliographic data
PartHTPart 2
51IPC main classICM
(ICMV)		 H10D 64/01 (2025.01)
51Previous IPC main classICMF
(ICMVF)		 H01L 21/283 (2006.01)
Date of update of the procedureREGTJan 2, 2025