Master dataINID | Criterion | Field | Content |
---|
| Type of IP right | SART | Patent |
| Status | ST | Pending/in force |
21 | DE file number | DAKZ | 10 2020 119 445.5 |
54 | Designation/title | TI | Halbleitervorrichtungsstruktur und deren Herstellungsverfahren |
51 | IPC main class | ICM (ICMV) | H10D 30/60 (2025.01) |
51 | IPC secondary class(es) | ICS (ICSV) | H10D 30/01 (2025.01) |
22 | DE application date | DAT | Jul 23, 2020 |
43 | Date of first publication | OT | Dec 16, 2021 |
71/73 | Applicant/owner | INH | Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW |
72 | Inventor | IN | Yeong, Sai-Hooi, Hsinchu, TW; Chui, Chi-On, Hsinchu, TW; Yao, Chien-Ning, Hsinchu, TW |
74 | Representative | VTR | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
10 | Published DE documents | DEPN | Original document:
DE102020119445A1 Searchable text:
DE102020119445A1 |
| Address for service | | BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE |
33 31 32
| Foreign priority | PRC PRNA PRDA
| US 16/899,832 Jun 12, 2020
|
| Due date | FT FG | Jul 31, 2026 Annual fee for the 7th year
Patent fees |
| Patent division in charge | | 33 |
56 | Citations | CT |
DE102017124637A1 (DE 10 2017 124 637 A1)
US020200091152A1 (US 2020 / 0 091 152 A1)
US020190221483A1 (US 2019 / 0 221 483 A1)
US020190081155A1 (US 2019 / 0 081 155 A1)
|
56 | NPL citations | CTNP | N.Loubet: A Novel Dry Selective Etch of SiGe for the Enablement of High Performance Logic Stacked Gate-All-Around NanoSheet Devices. In: IEEE, International Electron Device Meeting, Technical Digest, 2019, 245 – 248.; N.Loubet: Stacked Nanosheet gate - all around transistor to enable scaling beyond FINFET. In: Symposium on VLSI Technology, 2017, 230 – 231. |
43 | Date of first publication | EVT | Dec 16, 2021 |
| Number of official communications (office actions) | | 2 |
| Number of responses | | 1 |
| Date of the first transfer into DPMAregister | EREGT | Dec 16, 2021 |
| Date of the (most recent) update in DPMAregister | REGT | Aug 12, 2025 (Show all update days)(Hide all update days)- Aug 12, 2025
- Jul 10, 2025
- Citations: changed
- Number of official communications (office actions): changed
- Procedures: Examination procedure, Official communication on examination issued, 09.07.2025: new
- Jan 2, 2025
- IPC main class: changed
- IPC secondary class(es): changed
- Procedures: Change of classification, Change of IPC main class, 22.11.2024: new
- Aug 9, 2024
- Aug 7, 2024
- St.36: changed (technical change)
- Dec 16, 2021
- Date of the first transfer into DPMAregister
|