Register information Patent

DE file number : 10 2020 110 256.9 (Status: pending/in force, Query started: August 9, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2020 110 256.9
54Designation/titleTIIonenimplantierergiftgasversorgungssystem
51IPC main classICM
(ICMV)		 H01L 21/265 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H01J 37/317 (2006.01)
22DE application dateDATApr 15, 2020
43Date of first publicationOTOct 7, 2021
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72InventorINMeng, Ying-Chieh, Hsinchu, TW; Peng, Chui-Ya, Hsinchu, TW; Lin, Shih-Hao, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102020110256A1
Searchable text: DE102020110256A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
16/837,724
Apr 1, 2020
Due dateFT
FG		Apr 30, 2026
Annual fee for the 7th year Patent fees
Patent division in charge 33
56CitationsCT[X]    US000006515290B1 (US 6 515 290 B1)
[X]    US020130251913A1 (US 2013 / 0 251 913 A1)
[X]    DE102008028136A1 (DE 10 2008 028 136 A1)
43Date of first publicationEVTOct 7, 2021
Number of official communications (office actions) 2
Number of responses 1
Date of the first transfer into DPMAregisterEREGTOct 7, 2021
Date of the (most recent) update in DPMAregisterREGTMay 9, 2025
(Show all update days)(Hide all update days)
  • May 9, 2025
    • Due date: changed
  • May 7, 2025
    • St.36: changed (technical change)
  • Feb 13, 2025
    • Citations: changed
    • Number of official communications (office actions): changed
    • Procedures: Examination procedure, Official communication on examination issued, 12.02.2025: new
  • Aug 19, 2024
    • St.36: changed (technical change)
  • Oct 7, 2021
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Apr 15, 2020  Details anzeigen
2 Examination procedure Request for examination effectively filed Apr 15, 2020  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Jul 2, 2020  Details anzeigen
4 Examination procedure Official communication on examination Nov 13, 2020  Details anzeigen
5 Examination procedure Reply to official communication Apr 29, 2021  Details anzeigen
6 Publications Publication of application (Offenlegungsschrift) Oct 7, 2021 Oct 7, 2021 Details anzeigen
7 Examination procedure Official communication on examination Feb 12, 2025  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTApr 15, 2020
Date of update of the procedureREGTOct 7, 2021
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTApr 15, 2020
Third party request No
Date of receiptAEGTApr 15, 2020
Date of update of the procedureREGTOct 7, 2021
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTJul 2, 2020
Date of update of the procedureREGTOct 7, 2021
View procedures Examination procedure (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTNov 13, 2020
Date of update of the procedureREGTOct 7, 2021
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTApr 29, 2021
Date of update of the procedureREGTOct 7, 2021
View procedures Publications (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTOct 7, 2021
Issue numberHN40
YearPJ2021
Publication dateVTOct 7, 2021
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102020110256A1
Searchable text: DE102020110256A1
Date of update of the procedureREGTOct 7, 2021
View procedures Examination procedure (No.: 7)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTFeb 12, 2025
Date of update of the procedureREGTFeb 13, 2025