Register information Patent

DE file number : 10 2019 123 605.3 (Status: pending/in force, Query started: October 23, 2025)

Please note: This English version is a non-binding translation of the German register excerpt. Only the German version of the register excerpt is legally binding.

Master data
INIDCriterionFieldContent
Type of IP rightSARTPatent
StatusSTPending/in force
21DE file number DAKZ10 2019 123 605.3
54Designation/titleTIVERBESSERTE GLEICHFÖRMIGKEIT KRITISCHER DIMENSIONEN (CD) VON FOTOLACK-INSELSTRUKTUREN UNTER VERWENDUNG EINER PHASENVERSCHIEBUNGSWECHSELMASKE
51IPC main classICM
(ICMV)		 H01L 21/027 (2006.01)
51IPC secondary class(es)ICS
(ICSV)		 H10N 50/10 (2023.01), H10N 50/01 (2023.01)
22DE application dateDATSep 4, 2019
43Date of first publicationOTMar 19, 2020
71/73Applicant/ownerINHTaiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW
72InventorINHaq, Jesmin, Hsinchu, TW; Zhong, Tom, Hsinchu, TW; Teng, Zhongjian, Hsinchu, TW
74RepresentativeVTRBOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
10Published DE documentsDEPNOriginal document: DE102019123605A1
Searchable text: DE102019123605A1
Address for service BOEHMERT & BOEHMERT Anwaltspartnerschaft mbB - Patentanwälte Rechtsanwälte, 28359 Bremen, DE
33
31
32
Foreign priorityPRC
PRNA
PRDA
US
16/133,869
Sep 18, 2018
Due dateFT
FG		Sep 30, 2026
Annual fee for the 8th year Patent fees
Patent division in charge 33
56CitationsCT US000008993217B1 (US 8 993 217 B1)
US020170371247A1 (US 2017 / 0 371 247 A1)
DE112018005548T5 (DE 11 2018 005 548 T5)
43Date of first publicationEVTMar 19, 2020
Number of official communications (office actions) 1
Number of responses 1
Date of the first transfer into DPMAregisterEREGTMar 19, 2020
Date of the (most recent) update in DPMAregisterREGTOct 8, 2025
(Show all update days)(Hide all update days)
  • Oct 8, 2025
    • Due date: changed
  • Oct 7, 2025
    • St.36: changed (technical change)
  • Oct 8, 2024
    • Due date: changed
  • Aug 16, 2024
    • St.36: changed (technical change)
  • May 23, 2024; Dec 19, 2023; Dec 14, 2023; Aug 9, 2023; Jan 5, 2023; Dec 20, 2022; Aug 18, 2022; Jun 11, 2022; Aug 11, 2021
    • Historical data not available for this/these date(s)
  • Mar 19, 2020
    • Date of the first transfer into DPMAregister
Procedural data
No.Kind of procedureLegal statusDate of legal/procedural statusPublication dateAlle Details anzeigen
1 Pre-registration procedure The application is under preliminary examination Sep 4, 2019  Details anzeigen
2 Examination procedure Request for examination effectively filed Sep 4, 2019  Details anzeigen
3 Pre-registration procedure Pre-registration procedure has been concluded Oct 23, 2019  Details anzeigen
4 Publications Publication of application (Offenlegungsschrift) Mar 19, 2020 Mar 19, 2020 Details anzeigen
5 Examination procedure Official communication on examination Jun 10, 2022  Details anzeigen
6 Examination procedure Reply to official communication Dec 21, 2022  Details anzeigen
View procedures Pre-registration procedure (No.: 1)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTThe application is under preliminary examination
Date of legal/procedural statusVSTTSep 4, 2019
View procedures Examination procedure (No.: 2)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTRequest for examination effectively filed
Date of legal/procedural statusVSTTSep 4, 2019
Third party request No
Date of receiptAEGTSep 4, 2019
View procedures Pre-registration procedure (No.: 3)
INIDCriterionFieldContent Close details
Type of procedureVARTPre-registration procedure
Legal/procedural statusVSTPre-registration procedure has been concluded
Date of legal/procedural statusVSTTOct 23, 2019
View procedures Publications (No.: 4)
INIDCriterionFieldContent Close details
Type of procedureVARTPublications
Legal/procedural statusVSTPublication of application (Offenlegungsschrift)
Date of legal/procedural statusVSTTMar 19, 2020
Issue numberHN12
YearPJ2020
Publication dateVTMar 19, 2020
Type of publicationPARTDocuments
PartHTPart 2
10Published DE documentsDEPNOriginal document: DE102019123605A1
Searchable text: DE102019123605A1
View procedures Examination procedure (No.: 5)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTOfficial communication on examination
Date of legal/procedural statusVSTTJun 10, 2022
Date of update of the procedureREGTJun 11, 2022
View procedures Examination procedure (No.: 6)
INIDCriterionFieldContent Close details
Type of procedureVARTExamination procedure
Legal/procedural statusVSTReply to official communication
Date of legal/procedural statusVSTTDec 21, 2022
Date of update of the procedureREGTJan 5, 2023